USD981459SActiveUtility

Retaining ring for substrate

Assignee: EBARA CORPPriority: Jun 16, 2021Filed: Jun 16, 2021Granted: Mar 21, 2023
Est. expiryJun 16, 2041(~14.9 yrs left)· nominal 20-yr term from priority
79
PatentIndex Score
7
Cited by
18
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a retainer ring for substrate, as shown and described.

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