Inventor · disambiguated record
Osamu Nabeya
Also filed as: KOBATA ITSUKI · NABEYA OSAMU
99 granted patents·23 pending applications·2,163 citations·filing 2000–2025
99Inventor score
Top patents by PatentIndex Score
122 records- 0199USD793976SSubstrate retaining ringEBARA CORP·Filed 2016·Granted Aug 8, 2017·434 cites·1 claims
- 0299USD634719SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 22, 2011·539 cites·1 claims
- 0399USD633452SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 1, 2011·342 cites·1 claims
- 0496US10442056B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2013·Granted Oct 15, 2019·16 cites·29 claims
- 0595US12183642B2Film-thickness measuring method, method of detecting notch portion, and polishing apparatusEBARA CORP·Filed 2022·Granted Dec 31, 2024·2 cites·10 claims
- 0695US10486285B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2017·Granted Nov 26, 2019·9 cites·10 claims
- 0795US10040166B2Polishing apparatusEBARA CORP·Filed 2014·Granted Aug 7, 2018·11 cites·15 claims
- 0895US9403255B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Aug 2, 2016·14 cites·49 claims
- 0995US8083571B2Polishing apparatusNABEYA OSAMU·Filed 2005·Granted Dec 27, 2011·22 cites·5 claims
- 1094US9833875B2Polishing apparatus and retainer ring configurationEBARA CORP·Filed 2015·Granted Dec 5, 2017·5 cites·8 claims
- 1194US8859070B2Elastic membraneEBARA CORP·Filed 2012·Granted Oct 14, 2014·16 cites·25 claims
- 1294US6609962B1Dressing apparatus and polishing apparatusEBARA CORP·Filed 2000·Granted Aug 26, 2003·85 cites·23 claims
- 1393US10293455B2Polishing apparatusEBARA CORP·Filed 2016·Granted May 21, 2019·5 cites·18 claims
- 1493USD769200SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2013·Granted Oct 18, 2016·48 cites·1 claims
- 1593US9358662B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 7, 2016·9 cites·21 claims
- 1692US8795032B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodMIYAZAKI MITSURU·Filed 2009·Granted Aug 5, 2014·22 cites·14 claims
- 1792US8485866B2Substrate holding apparatus, polishing apparatus, and polishing methodYASUDA HOZUMI·Filed 2012·Granted Jul 16, 2013·8 cites·6 claims
- 1892US7357699B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2004·Granted Apr 15, 2008·49 cites·34 claims
- 1992US7311585B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 25, 2007·15 cites·12 claims
- 2092US6852019B2Substrate holding apparatusEBARA CORP·Filed 2001·Granted Feb 8, 2005·49 cites·40 claims
- 2191US7140955B2Polishing apparatusEBARA CORP·Filed 2002·Granted Nov 28, 2006·37 cites·20 claims
- 2291US7083507B2Substrate holding apparatusEBARA CORP·Filed 2005·Granted Aug 1, 2006·14 cites·37 claims
- 2390US10391603B2Polishing apparatus, control method and recording mediumEBARA CORP·Filed 2016·Granted Aug 27, 2019·4 cites·19 claims
- 2490US7632173B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2007·Granted Dec 15, 2009·11 cites·37 claims
- 2590US7491117B2Substrate holding apparatusEBARA CORP·Filed 2006·Granted Feb 17, 2009·11 cites·5 claims
- 2690US7207862B2Polishing apparatus and method for detecting foreign matter on polishing surfaceEBARA CORP·Filed 2003·Granted Apr 24, 2007·37 cites·8 claims
- 2789US11179823B2Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membraneEBARA CORP·Filed 2017·Granted Nov 23, 2021·3 cites·19 claims
- 2889US10702972B2Polishing apparatusEBARA CORP·Filed 2014·Granted Jul 7, 2020·7 cites·15 claims
- 2989USD839224SElastic membrane for semiconductor wafer polishingEBARA CORP·Filed 2017·Granted Jan 29, 2019·28 cites·1 claims
- 3089US10092992B2Polishing apparatus, polishing head, and retainer ringEBARA CORP·Filed 2016·Granted Oct 9, 2018·3 cites·29 claims
- 3189US9662764B2Substrate holder, polishing apparatus, and polishing methodEBARA CORP·Filed 2013·Granted May 30, 2017·7 cites·18 claims
- 3289US8100743B2Polishing apparatusNABEYA OSAMU·Filed 2008·Granted Jan 24, 2012·14 cites·8 claims
- 3388US7635292B2Substrate holding device and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 22, 2009·13 cites·13 claims
- 3487US11958163B2Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membraneEBARA CORP·Filed 2021·Granted Apr 16, 2024·1 cites·16 claims
- 3586US7988537B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2008·Granted Aug 2, 2011·8 cites·12 claims
- 3686US7867063B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2009·Granted Jan 11, 2011·8 cites·20 claims
- 3785US10464185B2Substrate polishing method, top ring, and substrate polishing apparatusEBARA CORP·Filed 2017·Granted Nov 5, 2019·2 cites·8 claims
- 3884USD766849SSubstrate retaining ringEBARA CORP·Filed 2013·Granted Sep 20, 2016·25 cites·1 claims
- 3984US8152594B2Polishing apparatusSAITO KENICHIRO·Filed 2008·Granted Apr 10, 2012·14 cites·10 claims
- 4084US2025312885A1Rubber membrane having first and second hardness for use in a polishing headEBARA CORP·Filed 2025·Application pending·0 cites
- 4183USD918161SElastic membraneEBARA CORP·Filed 2018·Granted May 4, 2021·1 cites·1 claims
- 4283US8845396B2Polishing apparatusNABEYA OSAMU·Filed 2011·Granted Sep 30, 2014·3 cites·7 claims
- 4383US7033260B2Substrate holding device and polishing deviceEBARA CORP·Filed 2002·Granted Apr 25, 2006·20 cites·42 claims
- 4482US12358096B2Rubber membrane having first and second hardness for use in a polishing headEBARA CORP·Filed 2022·Granted Jul 15, 2025·0 cites·8 claims
- 4582US9662761B2Polishing apparatusEBARA CORP·Filed 2014·Granted May 30, 2017·4 cites·24 claims
- 4682US7850509B2Substrate holding apparatusEBARA CORP·Filed 2008·Granted Dec 14, 2010·5 cites·5 claims
- 4781US2025289088A1Break-in processing apparatus and break-in processing methodEBARA CORP·Filed 2025·Application pending·0 cites
- 4880US11426834B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2019·Granted Aug 30, 2022·1 cites·2 claims
- 4980US11088011B2Elastic membrane, substrate holding device, and polishing apparatusEBARA CORP·Filed 2018·Granted Aug 10, 2021·2 cites·13 claims
- 5080US10537975B2Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatusEBARA CORP·Filed 2016·Granted Jan 21, 2020·2 cites·22 claims
Showing the top 50 of 122 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →