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Substrate retaining ring

84
Assignee: EBARA CORPPriority: May 15, 2013Filed: Nov 12, 2013Granted: Sep 20, 2016
Est. expiryMay 15, 2033(~6.8 yrs left)· nominal 20-yr term from priority
Inventors:Makoto FukushimaHozumi YasudaKeisuke NamikiOsamu NabeyaShingo TogashiSatoru Yamaki
84
PatentIndex Score
25
Cited by
31
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a substrate retaining ring, as shown and described.

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