Inventor · disambiguated record
Hozumi Yasuda
Also filed as: TOMA YASUSHI · YASUDA HOZUMI
82 granted patents·24 pending applications·2,255 citations·filing 1995–2024
99Inventor score
Top patents by PatentIndex Score
106 records- 0199USD793976SSubstrate retaining ringEBARA CORP·Filed 2016·Granted Aug 8, 2017·434 cites·1 claims
- 0299USD634719SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 22, 2011·539 cites·1 claims
- 0399USD633452SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2010·Granted Mar 1, 2011·342 cites·1 claims
- 0496US10442056B2Substrate holding apparatus and polishing apparatusEBARA CORP·Filed 2013·Granted Oct 15, 2019·16 cites·29 claims
- 0595US10040166B2Polishing apparatusEBARA CORP·Filed 2014·Granted Aug 7, 2018·11 cites·15 claims
- 0695US9403255B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Aug 2, 2016·14 cites·49 claims
- 0795US8932106B2Polishing apparatus having thermal energy measuring meansFUKUSHIMA MAKOTO·Filed 2011·Granted Jan 13, 2015·14 cites·9 claims
- 0894US8859070B2Elastic membraneEBARA CORP·Filed 2012·Granted Oct 14, 2014·16 cites·25 claims
- 0993US10293455B2Polishing apparatusEBARA CORP·Filed 2016·Granted May 21, 2019·5 cites·18 claims
- 1093USD769200SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2013·Granted Oct 18, 2016·48 cites·1 claims
- 1193US6435949B1Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereofEBARA CORP·Filed 2000·Granted Aug 20, 2002·71 cites·8 claims
- 1292US11911872B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2021·Granted Feb 27, 2024·2 cites·11 claims
- 1392US8485866B2Substrate holding apparatus, polishing apparatus, and polishing methodYASUDA HOZUMI·Filed 2012·Granted Jul 16, 2013·8 cites·6 claims
- 1492US6852019B2Substrate holding apparatusEBARA CORP·Filed 2001·Granted Feb 8, 2005·49 cites·40 claims
- 1591US11735457B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2020·Granted Aug 22, 2023·2 cites·8 claims
- 1691US7083507B2Substrate holding apparatusEBARA CORP·Filed 2005·Granted Aug 1, 2006·14 cites·37 claims
- 1790US10391603B2Polishing apparatus, control method and recording mediumEBARA CORP·Filed 2016·Granted Aug 27, 2019·4 cites·19 claims
- 1890US7491117B2Substrate holding apparatusEBARA CORP·Filed 2006·Granted Feb 17, 2009·11 cites·5 claims
- 1990US6890402B2Substrate holding apparatus and substrate polishing apparatusEBARA CORP·Filed 2001·Granted May 10, 2005·26 cites·29 claims
- 2089US10702972B2Polishing apparatusEBARA CORP·Filed 2014·Granted Jul 7, 2020·7 cites·15 claims
- 2189US10092992B2Polishing apparatus, polishing head, and retainer ringEBARA CORP·Filed 2016·Granted Oct 9, 2018·3 cites·29 claims
- 2289US9662764B2Substrate holder, polishing apparatus, and polishing methodEBARA CORP·Filed 2013·Granted May 30, 2017·7 cites·18 claims
- 2389US8100743B2Polishing apparatusNABEYA OSAMU·Filed 2008·Granted Jan 24, 2012·14 cites·8 claims
- 2489US6443821B1Workpiece carrier and polishing apparatus having workpiece carrierEBARA CORP·Filed 2000·Granted Sep 3, 2002·45 cites·18 claims
- 2588US8070560B2Polishing apparatus and methodYASUDA HOZUMI·Filed 2008·Granted Dec 6, 2011·13 cites·7 claims
- 2687US6077385APolishing apparatusEBARA CORP·Filed 1998·Granted Jun 20, 2000·59 cites·22 claims
- 2786US5679063APolishing apparatusEBARA CORP·Filed 1996·Granted Oct 21, 1997·81 cites·14 claims
- 2885US10464185B2Substrate polishing method, top ring, and substrate polishing apparatusEBARA CORP·Filed 2017·Granted Nov 5, 2019·2 cites·8 claims
- 2984US11511389B2Polishing head and polishing apparatusEBARA CORP·Filed 2019·Granted Nov 29, 2022·3 cites·11 claims
- 3084USD766849SSubstrate retaining ringEBARA CORP·Filed 2013·Granted Sep 20, 2016·25 cites·1 claims
- 3184US9399277B2Polishing apparatus and polishing methodEBARA CORP·Filed 2015·Granted Jul 26, 2016·3 cites·10 claims
- 3284US6019868APolishing apparatusEBARA CORP·Filed 1998·Granted Feb 1, 2000·57 cites·12 claims
- 3384US5651724AMethod and apparatus for polishing workpieceEBARA CORP·Filed 1995·Granted Jul 29, 1997·66 cites·17 claims
- 3483US8845396B2Polishing apparatusNABEYA OSAMU·Filed 2011·Granted Sep 30, 2014·3 cites·7 claims
- 3582US7850509B2Substrate holding apparatusEBARA CORP·Filed 2008·Granted Dec 14, 2010·5 cites·5 claims
- 3682US7101465B2Electrolytic processing device and substrate processing apparatusEBARA CORP·Filed 2003·Granted Sep 5, 2006·14 cites·62 claims
- 3779US10486284B2Substrate holding device, and substrate polishing apparatusEBARA CORP·Filed 2016·Granted Nov 26, 2019·1 cites·11 claims
- 3879USD808349SElastic membrane for semiconductor wafer polishing apparatusEBARA CORP·Filed 2016·Granted Jan 23, 2018·18 cites·1 claims
- 3979US9073170B2Polishing apparatus having thermal energy measuring meansEBARA CORP·Filed 2014·Granted Jul 7, 2015·2 cites·11 claims
- 4079US8267746B2Substrate holding apparatus, polishing apparatus, and polishing methodYASUDA HOZUMI·Filed 2008·Granted Sep 18, 2012·5 cites·8 claims
- 4179US7967665B2Substrate holding apparatus, polishing apparatus, and polishing methodEBARA CORP·Filed 2007·Granted Jun 28, 2011·5 cites·9 claims
- 4276USD799437SSubstrate retaining ringEBARA CORP·Filed 2016·Granted Oct 10, 2017·16 cites·1 claims
- 4375US9815171B2Substrate holder, polishing apparatus, polishing method, and retaining ringEBARA CORP·Filed 2014·Granted Nov 14, 2017·2 cites·27 claims
- 4475US8357029B2Polishing apparatusEBARA CORP·Filed 2009·Granted Jan 22, 2013·5 cites·16 claims
- 4575US6432258B1Apparatus for and method of polishing workpieceEBARA CORP·Filed 2000·Granted Aug 13, 2002·15 cites·14 claims
- 4675US2024316720A1Substrate processing control system, substrate processing control method, and programEBARA CORP·Filed 2024·Application pending·0 cites
- 4774US11478895B2Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding deviceEBARA CORP·Filed 2019·Granted Oct 25, 2022·0 cites·7 claims
- 4873US7897007B2Substrate holding apparatus and substrate polishing apparatusEBARA CORP·Filed 2008·Granted Mar 1, 2011·3 cites·6 claims
- 4972US12036634B2Substrate processing control system, substrate processing control method, and programEBARA CORP·Filed 2017·Granted Jul 16, 2024·1 cites·13 claims
- 5071US11465254B2Polishing machine and a polishing method for a substrateEBARA CORP·Filed 2020·Granted Oct 11, 2022·0 cites·7 claims
Showing the top 50 of 106 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →