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Substrate retaining ring

76
Assignee: EBARA CORPPriority: Aug 25, 2015Filed: Feb 24, 2016Granted: Oct 10, 2017
Est. expiryAug 25, 2035(~9.1 yrs left)· nominal 20-yr term from priority
Inventors:Osamu NabeyaHozumi YasudaMakoto FukushimaShingo TogashiKeisuke NamikiSatoru Yamaki
76
PatentIndex Score
16
Cited by
25
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for substrate retaining ring, as shown and described.

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