Inventor
PRABHU PRASHANT PRABHAKAR
IN5 patents
Patents
5 patentsUSD902165SNov 17, 2020
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC18 citations92
USD894137SAug 25, 2020
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC26 citations92
USD877101SMar 3, 2020
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC31 citations92
USD851613SJun 18, 2019
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC33 citations92
US11361982B2Jun 14, 2022
Methods and apparatus for in-situ cleaning of electrostatic chucks
APPLIED MATERIALS INC0 citations50