Inventor
SUENAGA YUTAKA
JP46 patents
⚠️ This page may combine multiple inventors who share the name “SUENAGA YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
39 patentsUS6633365B2Oct 14, 2003
Projection optical system and exposure apparatus having the projection optical system
NIKON CORP471 citations99
US6451507B1Sep 17, 2002
Exposure apparatus and method
NIKON CORP55 citations96
US6377338B1Apr 23, 2002
Exposure apparatus and method
NIKON CORP49 citations96
US6213610B1Apr 10, 2001
Catoptric reduction projection optical system and exposure apparatus and method using same
NIKON CORP80 citations96
US5668673ASep 16, 1997
Catadioptric reduction projection optical system
NIKON CORP62 citations96
US5220454AJun 15, 1993
Cata-dioptric reduction projection optical system
NIKON CORP72 citations96
US5694241ADec 2, 1997
Catadioptric reduction projection optical system and exposure apparatus employing the same
NIKON CORP92 citations95
US5592329AJan 7, 1997
Catadioptric optical system
NIKON CORP74 citations95
US6302548B2Oct 16, 2001
Catoptric reduction projection optical system and exposure apparatus and method using same
NIKON CORP43 citations93
US6108140AAug 22, 2000
Catadioptric reduction projection optical system and method
NIKON CORP19 citations93
US5978155ANov 2, 1999
Adapters for correcting spherical aberrations of objective lens
NIKON CORP20 citations93
US5930049AJul 27, 1999
Projection optical system and method of using such system for manufacturing devices
NIKON CORP48 citations93
US5920432AJul 6, 1999
Microscope objective lens
NIKON CORP24 citations93
US5589988ADec 31, 1996
Retrofocus-type wide angle lens system having a fixed front lens group and a movable rear lens group
NIKON CORP20 citations93
US7079314B1Jul 18, 2006
Catadioptric optical system and exposure apparatus equipped with the same
NIKON CORP45 citations92
US6084723AJul 4, 2000
Exposure apparatus
NIKON CORP31 citations92
US5943172AAug 24, 1999
Projection optical system and projection exposure apparatus
NIKON CORP34 citations92
US5940220AAug 17, 1999
Microscope objective lens with variable correction of aberrations imparted by transparent body between the specimen and the objective lens
NIKON CORP27 citations92
US5835282ANov 10, 1998
Zoom lens system
NIKON CORP22 citations92
US5831776ANov 3, 1998
Projection optical system and projection exposure apparatus
NIKON CORP38 citations92
US5831770ANov 3, 1998
Projection optical system and exposure apparatus provided therewith
NIKON CORP50 citations92
US5805344ASep 8, 1998
Projection optical system and projection exposure apparatus
NIKON CORP34 citations92
US4795244AJan 3, 1989
Projection type exposure apparatus
NIKON CORP38 citations92
US6259557B1Jul 10, 2001
Device and method for dark field illumination
NIKON CORP35 citations91
US5835285ANov 10, 1998
Projection optical system and exposure apparatus using the same
NIKON CORP42 citations91
US5781278AJul 14, 1998
Projection optical system and exposure apparatus with the same
NIKON CORP47 citations91
US5532878AJul 2, 1996
Objective lens system for microscope
NIKON CORP32 citations89
US6452723B1Sep 17, 2002
Exposure apparatus and method
NIKON CORP10 citations82
US5712735AJan 27, 1998
Catadioptric reduction projection optical system
NIKON CORP12 citations82
US4798962AJan 17, 1989
Multi-wavelength projection exposure and alignment apparatus
NIKON CORP22 citations81
US6707601B2Mar 16, 2004
Exposure apparatus and method
NIKON CORP4 citations74
US6646797B2Nov 11, 2003
Exposure apparatus and method
NIKON CORP6 citations74
US5844728ADec 1, 1998
Catadioptric reduction projection optical system
NIKON CORP4 citations74
US5477388ADec 19, 1995
Inverse telescopic wide angle lens
NIKON CORP14 citations73
US5889617AMar 30, 1999
Objective lens systems
NIKON CORP8 citations72
US5708531AJan 13, 1998
Objective lens system
NIKON CORP14 citations72
US6856377B2Feb 15, 2005
Relay image optical system, and illuminating optical device and exposure system provided with the optical system
NIKON CORP2 citations63
US6118596ASep 12, 2000
Catadioptric reduction projection optical system and method
NIKON CORP3 citations63
US5751486AMay 12, 1998
Shake-preventing correction optical system
NIKON CORP6 citations62
NIPPON KOGAKU KK
5 patentsUS4626079ADec 2, 1986
Dark field illumination apparatus for epi-illumination system
NIPPON KOGAKU KK60 citations96
US4723845AFeb 9, 1988
Optical apparatus for the detection of position
NIPPON KOGAKU KK20 citations82
USRE37846ESep 17, 2002
Projection optical system and exposure apparatus using the same
NIPPON KOGAKU KK9 citations72
USRE36740EJun 20, 2000
Cata-dioptric reduction projection optical system
NIPPON KOGAKU KK5 citations63
USRE38403EJan 27, 2004
Projection optical system and projection exposure apparatus
NIPPON KOGAKU KK2 citations62