Inventor
MIYASAWA YASUYUKI
JP7 patents
Patents
7 patentsUSD851140SJun 11, 2019
Pressing member for substrate polishing apparatus
EBARA CORP6 citations83
USD851142SJun 11, 2019
Pressing member for substrate polishing apparatus
EBARA CORP4 citations83
USD851141SJun 11, 2019
Pressing member for substrate polishing apparatus
EBARA CORP6 citations83
USD834075SNov 20, 2018
Pressing member for substrate polishing apparatus
EBARA CORP7 citations83
US10632588B2Apr 28, 2020
Polishing apparatus and pressing pad for pressing polishing tool
EBARA CORP1 citations61
US12403507B2Sep 2, 2025
Transfer apparatus, cleaning module, and substrate processing apparatus
EBARA CORP0 citations53
US10508355B2Dec 17, 2019
Plating apparatus
EBARA CORP0 citations36