Inventor · disambiguated record
Gary Powell
Also filed as: POWELL GARY · POWELL GARY B
13 granted patents·1 pending application·1,258 citations·filing 1984–2008
94Inventor score
Top patents by PatentIndex Score
14 records- 0196US4579618APlasma reactor apparatusTEGAL CORP·Filed 1984·Granted Apr 1, 1986·543 cites·3 claims
- 0295US6867859B1Inductively coupled plasma spectrometer for process diagnostics and controlLIGHTWIND CORP·Filed 2000·Granted Mar 15, 2005·445 cites·24 claims
- 0388US7202946B2Method and device utilizing plasma source for real-time gas samplingLIGHTWIND CORP·Filed 2006·Granted Apr 10, 2007·13 cites·22 claims
- 0482US7072028B2Method and apparatus for chemical monitoringLIGHTWIND CORP·Filed 2004·Granted Jul 4, 2006·16 cites·44 claims
- 0581US7580119B2Method and apparatus for chemical monitoringLIGHTWIND CORP·Filed 2008·Granted Aug 25, 2009·5 cites·5 claims
- 0681US6791692B2Method and device utilizing plasma source for real-time gas samplingLIGHTWIND CORP·Filed 2001·Granted Sep 14, 2004·22 cites·42 claims
- 0780US4971653ATemperature controlled chuck for elevated temperature etch processingMATRIX INTEGRATED SYSTEMS·Filed 1990·Granted Nov 20, 1990·88 cites·10 claims
- 0879US7456939B2Method and apparatus for chemical monitoringLIGHTWIND CORP·Filed 2006·Granted Nov 25, 2008·4 cites·2 claims
- 0979US6538734B2Method and device utilizing real-time gas samplingLIGHTWIND CORP·Filed 2000·Granted Mar 25, 2003·18 cites·78 claims
- 1077US5015331AMethod of plasma etching with parallel plate reactor having a gridMATRIX INTEGRATED SYSTEMS·Filed 1990·Granted May 14, 1991·70 cites·34 claims
- 1167US7019829B2Method and device utilizing plasma source for real-time gas samplingLIGHTWIND CORP·Filed 2004·Granted Mar 28, 2006·10 cites·21 claims
- 1262US6757061B2Method and device utilizing real-time gas samplingLIGHTWIND CORP·Filed 2002·Granted Jun 29, 2004·4 cites·72 claims
- 1353US2003126025A1Method, system, and storage medium for facilitating procurement of direct and indirect itemsFiled 2001·Application pending·0 cites
- 1449US5209803AParallel plate reactor and method of useMATRIX INTEGRATED SYSTEMS INC·Filed 1991·Granted May 11, 1993·20 cites·43 claims
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