Inventor · disambiguated record
Koen Jacobus Johannes Maria Zaal
Also filed as: ZAAL KOEN J J M · ZAAL KOEN JACOBUS JOHANNES · ZAAL KOEN JACOBUS JOHANNES MAR · ZAAL KOEN JACOBUS JOHANNES MARIA
55 granted patents·3 pending applications·447 citations·filing 2003–2022
98Inventor score
Files withASML NETHERLANDS BV48ZAAL KOEN JACOBUS JOHANNES MARIA3CADEE THEODORUS PETRUS MARIA2STREEFKERK BOB2DE JONG FREDERIK EDUARD1
Top patents by PatentIndex Score
58 records- 0199US11669021B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2022·Granted Jun 6, 2023·2 cites·20 claims
- 0298US7649611B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jan 19, 2010·45 cites·27 claims
- 0397US7671963B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Mar 2, 2010·35 cites·19 claims
- 0496US10761433B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Sep 1, 2020·3 cites·24 claims
- 0595US9436096B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 6, 2016·5 cites·20 claims
- 0695US8743339B2Lithographic apparatus and device manufacturing methodZAAL KOEN JACOBUS JOHANNES MARIA·Filed 2009·Granted Jun 3, 2014·14 cites·20 claims
- 0794US11275316B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Mar 15, 2022·2 cites·21 claims
- 0894US9851644B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 26, 2017·3 cites·21 claims
- 0994US7903866B2Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable objectASML NETHERLANDS BV·Filed 2007·Granted Mar 8, 2011·16 cites·33 claims
- 1091US7411657B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 12, 2008·30 cites·41 claims
- 1191US7187433B2Electrostatic clamp assembly for a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Mar 6, 2007·18 cites·19 claims
- 1289US7110085B2Lithographic apparatus, substrate holder and method of manufacturingASML NETHERLANDS BV·Filed 2004·Granted Sep 19, 2006·36 cites·20 claims
- 1388US8947631B2Lithographic apparatus and device manufacturing methodZAAL KOEN JACOBUS JOHANNES MARIA·Filed 2011·Granted Feb 3, 2015·3 cites·25 claims
- 1487US10222711B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Mar 5, 2019·1 cites·20 claims
- 1587US7227619B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 5, 2007·28 cites·24 claims
- 1687US7145269B2Lithographic apparatus, Lorentz actuator, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 5, 2006·30 cites·16 claims
- 1784US11150560B2Projection system and mirror and radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 19, 2021·1 cites·7 claims
- 1884US9188882B2Lithographic apparatus and device manufacturing methodOTTENS JOOST JEROEN·Filed 2011·Granted Nov 17, 2015·3 cites·20 claims
- 1982US7327439B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 5, 2008·19 cites·35 claims
- 2081US10732511B2Projection system and mirror and radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 4, 2020·1 cites·19 claims
- 2181US7423725B2Lithographic methodASML NETHERLANDS BV·Filed 2006·Granted Sep 9, 2008·5 cites·31 claims
- 2280US7486381B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 3, 2009·12 cites·25 claims
- 2380US7119885B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 10, 2006·19 cites·20 claims
- 2478US9581916B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Feb 28, 2017·1 cites·20 claims
- 2577US9618859B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Apr 11, 2017·2 cites·20 claims
- 2677US6897945B1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted May 24, 2005·19 cites·14 claims
- 2776US8616598B2Apparatus and method for contactless handling of an objectCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Dec 31, 2013·6 cites·18 claims
- 2876US7804582B2Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 28, 2010·5 cites·6 claims
- 2973US10216093B2Projection system and minor and radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Feb 26, 2019·1 cites·27 claims
- 3073US8553201B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2008·Granted Oct 8, 2013·2 cites·20 claims
- 3173US8514365B2Lithographic apparatus and device manufacturing methodDE JONG FREDERIK EDUARD·Filed 2007·Granted Aug 20, 2013·5 cites·20 claims
- 3272US7012264B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 14, 2006·9 cites·22 claims
- 3368US7239368B2Using unflatness information of the substrate table or mask table for decreasing overlayASML NETHERLANDS BV·Filed 2004·Granted Jul 3, 2007·10 cites·13 claims
- 3467US7746447B2Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Jun 29, 2010·2 cites·8 claims
- 3567US7019816B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 28, 2006·8 cites·13 claims
- 3666US7161662B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jan 9, 2007·8 cites·15 claims
- 3765US7426011B2Method of calibrating a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 16, 2008·2 cites·25 claims
- 3865US7327437B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 5, 2008·10 cites·27 claims
- 3962US8941810B2Lithographic apparatus and device manufacturing methodZAAL KOEN JACOBUS JOHANNES MARIA·Filed 2011·Granted Jan 27, 2015·0 cites·26 claims
- 4061US8749754B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2009·Granted Jun 10, 2014·0 cites·18 claims
- 4160US9494869B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Nov 15, 2016·1 cites·20 claims
- 4260US7027132B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 11, 2006·5 cites·14 claims
- 4359US7113262B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Sep 26, 2006·8 cites·17 claims
- 4458US7110091B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Sep 19, 2006·4 cites·16 claims
- 4557US7019820B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Mar 28, 2006·4 cites·13 claims
- 4653US2015034788A1Rotatable Frame For a Lithographic ApparatusASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
- 4752US8457385B2Measurement system and lithographic apparatus for measuring a position dependent signal of a movable objectVAN DER WIJST MARC WILHELMUS MARIA·Filed 2011·Granted Jun 4, 2013·0 cites·13 claims
- 4851US7528935B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted May 5, 2009·0 cites·20 claims
- 4951US7230254B2Movable carriage for a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jun 12, 2007·0 cites·19 claims
- 5051US7133120B2Lithographic apparatus, article support member, and methodASML NETHERLANDS BV·Filed 2004·Granted Nov 7, 2006·2 cites·17 claims
Showing the top 50 of 58 patent records by PatentIndex Score.
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