Inventor
MIYAZAKI MITSURU
JP67 patents
⚠️ This page may combine multiple inventors who share the name “MIYAZAKI MITSURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
41 patentsUS6629883B2Oct 7, 2003
Polishing apparatus
EBARA CORP68 citations94
US7087117B2Aug 8, 2006
Substrate processing apparatus and substrate processing method
EBARA CORP23 citations92
US10486285B2Nov 26, 2019
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US9700988B2Jul 11, 2017
Substrate processing apparatus
EBARA CORP8 citations84
US9358662B2Jun 7, 2016
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US7575636B2Aug 18, 2009
Substrate processing apparatus and substrate processing method
EBARA CORP8 citations84
US7442257B2Oct 28, 2008
Substrate processing apparatus and substrate processing method
EBARA CORP9 citations84
USD790489SJun 27, 2017
Vacuum contact pad
EBARA CORP16 citations83
US9362129B2Jun 7, 2016
Polishing apparatus and polishing method
EBARA CORP7 citations83
US11426834B2Aug 30, 2022
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP1 citations73
US10201888B2Feb 12, 2019
Substrate processing apparatus
EBARA CORP3 citations73
USD795315SAug 22, 2017
Dresser disk
EBARA CORP5 citations73
US9269605B2Feb 23, 2016
Substrate gripping apparatus
EBARA CORP4 citations73
US7585205B2Sep 8, 2009
Substrate polishing apparatus and method
EBARA CORP7 citations73
US9673067B2Jun 6, 2017
Substrate processing apparatus and processed substrate manufacturing method
EBARA CORP3 citations72
US7235135B2Jun 26, 2007
Substrate processing apparatus and substrate processing method
EBARA CORP9 citations71
US12046500B2Jul 23, 2024
Transport apparatus and substrate processing apparatus
EBARA CORP0 citations63
US12350787B2Jul 8, 2025
Substrate processing apparatus
EBARA CORP0 citations62
US11766756B2Sep 26, 2023
Substrate support apparatus and substrate cleaning apparatus
EBARA CORP1 citations62
US11731240B2Aug 22, 2023
Substrate processing apparatus
EBARA CORP0 citations62
US11103972B2Aug 31, 2021
Buff processing device and substrate processing device
EBARA CORP0 citations62
US10898987B2Jan 26, 2021
Table for holding workpiece and processing apparatus with the table
EBARA CORP0 citations62
US10575697B2Mar 3, 2020
Substrate cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations62
US12205831B2Jan 21, 2025
Cleaning apparatus and polishing apparatus
EBARA CORP0 citations61
US11948811B2Apr 2, 2024
Cleaning apparatus and polishing apparatus
EBARA CORP0 citations61
US10879086B2Dec 29, 2020
Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus
EBARA CORP1 citations61
US10573509B2Feb 25, 2020
Cleaning apparatus and substrate processing apparatus
EBARA CORP1 citations61
US12532694B2Jan 20, 2026
Substrate cleaning device and substrate processing device
EBARA CORP0 citations60
US11894244B2Feb 6, 2024
Cleaning member mounting mechanism and substrate cleaning apparatus
EBARA CORP0 citations60
USD992845SJul 18, 2023
Roller shaft for substrate cleaning
EBARA CORP0 citations60
US12094754B2Sep 17, 2024
Substrate supporting apparatus and method of controlling substrate supporting apparatus
EBARA CORP0 citations52
US11967508B2Apr 23, 2024
Damper control system and damper control method
EBARA CORP0 citations52
US9892953B2Feb 13, 2018
Substrate gripping apparatus
EBARA CORP0 citations52
US9687957B2Jun 27, 2017
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP0 citations52
US9558971B2Jan 31, 2017
Substrate holding apparatus and substrate cleaning apparatus
EBARA CORP1 citations52
USD735430SJul 28, 2015
Roller shaft for substrate cleaning
EBARA CORP1 citations52
USD735429SJul 28, 2015
Roller shaft for substrate cleaning
EBARA CORP1 citations52
USD735431SJul 28, 2015
Roller shaft for substrate cleaning
EBARA CORP1 citations52
US7976362B2Jul 12, 2011
Substrate polishing apparatus and method
EBARA CORP1 citations52
US12463062B2Nov 4, 2025
Substrate processing apparatus, computer-readable storage medium storing a program, and substrate processing method
EBARA CORP0 citations51
US12370578B2Jul 29, 2025
Substrate cleaning apparatus and substrate cleaning method
EBARA CORP0 citations51
OILES INDUSTRY CO LTD
3 patentsUS8002093B2Aug 23, 2011
Damper and vibration damping structure using the same
OILES INDUSTRY CO LTD8 citations82
US7182187B2Feb 27, 2007
Damper and vibration damping structure using the same
OILES INDUSTRY CO LTD13 citations82
US7565957B2Jul 28, 2009
Damper and vibration damping structure using the same
OILES INDUSTRY CO LTD6 citations72
OKUMURA CORP
1 patentMIYAZAKI MITSURU
1 patentFUJITA SATOSHI
1 patentWANG XINMING
1 patentKATSUOKA SEIJI
1 patentYOKOYAMA TOSHIO
1 patentShowing the top 50 of 67 patents by PatentIndex Score.