Inventor · disambiguated record
Arne Benson
Also filed as: BENSON ARNE · BENSON ARNE C
3 granted patents·1 pending application·29 citations·filing 2001–2009
67Inventor score
Files withFSI INT INC4
Top patents by PatentIndex Score
4 records- 0165US6807984B2High flow high control valve and assemblyFSI INT INC·Filed 2001·Granted Oct 26, 2004·19 cites·13 claims
- 0254US7422031B2Rotary unions, fluid delivery systems, and related methodsFSI INT INC·Filed 2004·Granted Sep 9, 2008·9 cites·20 claims
- 0343US2010124410A1System for supplying water vapor in semiconductor wafer treatmentFSI INT INC·Filed 2009·Application pending·0 cites
- 0438US7556697B2System and method for carrying out liquid and subsequent drying treatments on one or more wafersFSI INT INC·Filed 2004·Granted Jul 7, 2009·1 cites·11 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →