Inventor · disambiguated record
Daigo Yamaguchi
Also filed as: YAMAGUCHI DAIGO
3 granted patents·5 pending applications·3 citations·filing 2013–2025
53Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0180US10784116B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2018·Granted Sep 22, 2020·3 cites·17 claims
- 0257US2023411148A1Processing method, method of manufacturing semiconductor device, processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0355US2024145233A1Processing method, method of manufacturing semiconductor device, processing apparatus and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0452US2022415652A1Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 0551US9111748B2Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer readable recording mediumHITACHI INT ELECTRIC INC·Filed 2013·Granted Aug 18, 2015·0 cites·17 claims
- 0647US2025226206A1Method of processing substrate, method of manufacturing semiconductor device, substrate processing system, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 0745US9831083B2Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2013·Granted Nov 28, 2017·0 cites·14 claims
- 0844US2015315702A1Substrate Processing ApparatusHITACHI INT ELECTRIC INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →