Inventor · disambiguated record
Marco Hugo Petrus Moers
Also filed as: MOERS MARCO H · MOERS MARCO HUGO PETRUS
7 granted patents·301 citations·filing 2001–2015
87Inventor score
Top patents by PatentIndex Score
7 records- 0195US6650399B2Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrationsASML NETHERLANDS BV·Filed 2002·Granted Nov 18, 2003·172 cites·15 claims
- 0292US6646729B2Method of measuring aberration in an optical imaging systemASML NETHERLANDS BV·Filed 2001·Granted Nov 11, 2003·59 cites·17 claims
- 0388US6819405B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Nov 16, 2004·35 cites·28 claims
- 0481US9601310B2Charged particle microscope with barometric pressure correctionFEI CO·Filed 2015·Granted Mar 21, 2017·3 cites·20 claims
- 0578US6897947B1Method of measuring aberration in an optical imaging systemASML NETHERLANDS BV·Filed 2003·Granted May 24, 2005·16 cites·21 claims
- 0675US8835846B2Imaging a sample in a TEM equipped with a phase plateFEI CO·Filed 2013·Granted Sep 16, 2014·3 cites·20 claims
- 0769US6862076B2Method of determining stray radiation lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Granted Mar 1, 2005·13 cites·11 claims
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