Inventor · disambiguated record
Kenneth J. Bahng
Also filed as: BAHNG KENNETH J
5 granted patents·742 citations·filing 1991–2009
85Inventor score
Top patents by PatentIndex Score
5 records- 0195US8293016B2Apparatus for efficient removal of halogen residues from etched substratesBAHNG KENNETH J·Filed 2009·Granted Oct 23, 2012·555 cites·11 claims
- 0289US7846845B2Integrated method for removal of halogen residues from etched substrates in a processing systemAPPLIED MATERIALS INC·Filed 2007·Granted Dec 7, 2010·16 cites·27 claims
- 0389US5199483AMethod and apparatus for cooling wafersAPPLIED MATERIALS INC·Filed 1991·Granted Apr 6, 1993·156 cites·24 claims
- 0473US7946759B2Substrate temperature measurement by infrared transmissionAPPLIED MATERIALS INC·Filed 2007·Granted May 24, 2011·4 cites·23 claims
- 0564US6729945B2Apparatus for controlling leading edge and trailing edge polishingLAM RES CORP·Filed 2001·Granted May 4, 2004·11 cites·23 claims
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