Inventor · disambiguated record
Atsuhiko Suda
Also filed as: SUDA ATSUHIKO
11 granted patents·4 pending applications·466 citations·filing 1994–2016
89Inventor score
Files withHITACHI INT ELECTRIC INC8KOKUSAI ELECTRIC CO LTD2HITACHI MAXELL1HORITA TOMOKI1MIYA HIRONOBU1
Top patents by PatentIndex Score
15 records- 0195US5772770ASubstrate processing apparatusKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted Jun 30, 1998·314 cites·28 claims
- 0293US9431220B1Substrate processing apparatus and substrate processing systemHITACHI INT ELECTRIC INC·Filed 2015·Granted Aug 30, 2016·10 cites·15 claims
- 0388US6053980ASubstrate processing apparatusKOKUSAI ELECTRIC CO LTD·Filed 1997·Granted Apr 25, 2000·120 cites·67 claims
- 0481US7981815B2Semiconductor device producing method and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2007·Granted Jul 19, 2011·8 cites·23 claims
- 0577US8641829B2Substrate processing systemHITACHI INT ELECTRIC INC·Filed 2013·Granted Feb 4, 2014·1 cites·3 claims
- 0676US9666494B2Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Granted May 30, 2017·2 cites·16 claims
- 0767US9735068B2Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted Aug 15, 2017·1 cites·16 claims
- 0864US8506714B2Substrate processing systemHORITA TOMOKI·Filed 2007·Granted Aug 13, 2013·1 cites·8 claims
- 0958US8240271B2Substrate processing apparatusSUDA ATSUHIKO·Filed 2006·Granted Aug 14, 2012·1 cites·8 claims
- 1047US2009071505A1Cleaning method and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 1146US2010186774A1Cleaning method and substrate processing apparatusMIYA HIRONOBU·Filed 2008·Application pending·0 cites
- 1242US9355866B2Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted May 31, 2016·0 cites·18 claims
- 1341US5480702AArticle having indicia-receiving layerHITACHI MAXELL·Filed 1994·Granted Jan 2, 1996·8 cites·8 claims
- 1436US2017040232A1Method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Application pending·0 cites
- 1535US2006090849A1Substrate processing apparatusTOYODA KAZUYUKI·Filed 2005·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →