Inventor
SAMIR MEHMET TUGRUL
US43 patents
⚠️ This page may combine multiple inventors who share the name “SAMIR MEHMET TUGRUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
39 patentsUS10699921B2Jun 30, 2020
Semiconductor processing chamber multistage mixing apparatus
APPLIED MATERIALS INC32 citations94
US10679870B2Jun 9, 2020
Semiconductor processing chamber multistage mixing apparatus
APPLIED MATERIALS INC32 citations94
US9695508B2Jul 4, 2017
Liner assembly for chemical vapor deposition chamber
APPLIED MATERIALS INC18 citations92
USD717746SNov 18, 2014
Lower chamber liner
APPLIED MATERIALS INC26 citations92
USD716239SOct 28, 2014
Upper chamber liner
APPLIED MATERIALS INC19 citations92
US9553002B2Jan 24, 2017
Flow controlled liner having spatially distributed gas passages
APPLIED MATERIALS INC9 citations84
US9322097B2Apr 26, 2016
EPI base ring
APPLIED MATERIALS INC7 citations84
USD716240SOct 28, 2014
Lower chamber liner
APPLIED MATERIALS INC16 citations84
USD711331SAug 19, 2014
Upper chamber liner
APPLIED MATERIALS INC15 citations84
US10964512B2Mar 30, 2021
Semiconductor processing chamber multistage mixing apparatus and methods
APPLIED MATERIALS INC3 citations73
US10760161B2Sep 1, 2020
Inject insert for EPI chamber
APPLIED MATERIALS INC2 citations73
US10577690B2Mar 3, 2020
Gas distribution showerhead for semiconductor processing
APPLIED MATERIALS INC2 citations73
US10170342B2Jan 1, 2019
Flow controlled liner having spatially distributed gas passages
APPLIED MATERIALS INC4 citations73
US10132003B2Nov 20, 2018
Heating modulators to improve epi uniformity tuning
APPLIED MATERIALS INC2 citations73
US10119192B2Nov 6, 2018
EPI base ring
APPLIED MATERIALS INC3 citations73
US9905454B2Feb 27, 2018
Substrate transfer mechanisms
APPLIED MATERIALS INC4 citations73
US9842748B2Dec 12, 2017
Flow controlled liner having spatially distributed gas passages
APPLIED MATERIALS INC4 citations73
US9748121B2Aug 29, 2017
Thermal coupled quartz dome heat sink
APPLIED MATERIALS INC2 citations73
US9580835B2Feb 28, 2017
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC2 citations73
US9532401B2Dec 27, 2016
Susceptor support shaft with uniformity tuning lenses for EPI process
APPLIED MATERIALS INC5 citations73
US9123765B2Sep 1, 2015
Susceptor support shaft for improved wafer temperature uniformity and process repeatability
APPLIED MATERIALS INC5 citations73
US11276559B2Mar 15, 2022
Semiconductor processing chamber for multiple precursor flow
APPLIED MATERIALS INC3 citations72
US9768043B2Sep 19, 2017
Quartz upper and lower domes
APPLIED MATERIALS INC4 citations72
US10356848B2Jul 16, 2019
Lamp heating for process chamber
APPLIED MATERIALS INC1 citations63
US11515179B2Nov 29, 2022
Semiconductor processing chamber multistage mixing apparatus
APPLIED MATERIALS INC0 citations62
US10781533B2Sep 22, 2020
Batch processing chamber
APPLIED MATERIALS INC1 citations62
US10077508B2Sep 18, 2018
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC1 citations62
US9230837B2Jan 5, 2016
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC1 citations62
US11915950B2Feb 27, 2024
Multi-zone semiconductor substrate supports
APPLIED MATERIALS INC1 citations61
US11361939B2Jun 14, 2022
Semiconductor processing chamber for multiple precursor flow
APPLIED MATERIALS INC1 citations61
US11276590B2Mar 15, 2022
Multi-zone semiconductor substrate supports
APPLIED MATERIALS INC1 citations61
US11060203B2Jul 13, 2021
Liner for epi chamber
APPLIED MATERIALS INC0 citations52
US10923386B2Feb 16, 2021
Processing chamber
APPLIED MATERIALS INC0 citations52
US10837121B2Nov 17, 2020
Susceptor support
APPLIED MATERIALS INC0 citations52
US10829855B2Nov 10, 2020
Gas distribution showerhead for semiconductor processing
APPLIED MATERIALS INC0 citations52
US10453733B2Oct 22, 2019
Substrate transfer mechanisms
APPLIED MATERIALS INC0 citations52
US9814099B2Nov 7, 2017
Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same
APPLIED MATERIALS INC1 citations52
US12488967B2Dec 2, 2025
Extreme uniformity heated substrate support assembly
APPLIED MATERIALS INC0 citations48
US9279604B2Mar 8, 2016
Compact ampoule thermal management system
APPLIED MATERIALS INC0 citations48