Inventor
NIIMI HIROAKI
US127 patents
⚠️ This page may combine multiple inventors who share the name “NIIMI HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
20 patentsUS6730566B2May 4, 2004
Method for non-thermally nitrided gate formation for high voltage devices
TEXAS INSTRUMENTS INC74 citations98
US6548366B2Apr 15, 2003
Method of two-step annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile
TEXAS INSTRUMENTS INC56 citations96
US6503846B1Jan 7, 2003
Temperature spike for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates
TEXAS INSTRUMENTS INC64 citations96
US6610614B2Aug 26, 2003
Method for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates
TEXAS INSTRUMENTS INC67 citations95
US7163877B2Jan 16, 2007
Method and system for modifying a gate dielectric stack containing a high-k layer using plasma processing
TEXAS INSTRUMENTS INC26 citations92
US6632747B2Oct 14, 2003
Method of ammonia annealing of ultra-thin silicon dioxide layers for uniform nitrogen profile
TEXAS INSTRUMENTS INC51 citations92
US9087918B2Jul 21, 2015
Structure and method for metal gate stack oxygen concentration control using an oxygen diffusion barrier layer and a sacrificial oxygen gettering layer
TEXAS INSTRUMENTS INC6 citations84
US9070785B1Jun 30, 2015
High-k / metal gate CMOS transistors with TiN gates
TEXAS INSTRUMENTS INC10 citations84
US7199020B2Apr 3, 2007
Nitridation of STI liner oxide for modulating inverse width effects in semiconductor devices
TEXAS INSTRUMENTS INC12 citations84
US6780719B2Aug 24, 2004
Method for annealing ultra-thin, high quality gate oxide layers using oxidizer/hydrogen mixtures
TEXAS INSTRUMENTS INC13 citations84
US7393787B2Jul 1, 2008
Formation of nitrogen containing dielectric layers having a uniform nitrogen distribution therein using a high temperature chemical treatment
TEXAS INSTRUMENTS INC9 citations83
US7960802B2Jun 14, 2011
Methods to enhance effective work function of mid-gap metal by incorporating oxygen and hydrogen at a low thermal budget
TEXAS INSTRUMENTS INC4 citations74
US7906441B2Mar 15, 2011
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC6 citations74
US6921703B2Jul 26, 2005
System and method for mitigating oxide growth in a gate dielectric
TEXAS INSTRUMENTS INC10 citations74
US9780192B2Oct 3, 2017
Fringe capacitance reduction for replacement gate CMOS
TEXAS INSTRUMENTS INC2 citations73
US9721847B2Aug 1, 2017
High-k / metal gate CMOS transistors with TiN gates
TEXAS INSTRUMENTS INC2 citations73
US9397009B2Jul 19, 2016
Structure and method for metal gate stack oxygen concentration control using an oxygen diffusion barrier layer and a sacrificial oxygen gettering layer
TEXAS INSTRUMENTS INC4 citations73
US9000539B2Apr 7, 2015
Metal-gate MOS transistor and method of forming the transistor with reduced gate-to-source and gate-to-drain overlap capacitance
TEXAS INSTRUMENTS INC4 citations73
US7560792B2Jul 14, 2009
Reliable high voltage gate dielectric layers using a dual nitridation process
TEXAS INSTRUMENTS INC5 citations73
US7183165B2Feb 27, 2007
Reliable high voltage gate dielectric layers using a dual nitridation process
TEXAS INSTRUMENTS INC5 citations73
IBM
13 patentsUS9484255B1Nov 1, 2016
Hybrid source and drain contact formation using metal liner and metal insulator semiconductor contacts
IBM15 citations92
US9972682B2May 15, 2018
Low resistance source drain contact formation
IBM13 citations84
US9917060B1Mar 13, 2018
Forming a contact for a semiconductor device
IBM11 citations84
US9735111B2Aug 15, 2017
Dual metal-insulator-semiconductor contact structure and formulation method
IBM5 citations84
US9589851B2Mar 7, 2017
Dipole-based contact structure to reduce metal-semiconductor contact resistance in MOSFETs
IBM13 citations83
US10818599B2Oct 27, 2020
Hybrid source and drain contact formation using metal liner and metal insulator semiconductor contacts
IBM2 citations73
US10535606B2Jan 14, 2020
Dual metal-insulator-semiconductor contact structure and formulation method
IBM2 citations73
US10510617B2Dec 17, 2019
CMOS VFET contacts with trench solid and liquid phase epitaxy
IBM3 citations73
US10243073B2Mar 26, 2019
Vertical channel field-effect transistor (FET) process compatible long channel transistors
IBM2 citations73
US10211094B2Feb 19, 2019
Hybrid source and drain contact formation using metal liner and metal insulator semiconductor contacts
IBM3 citations73
US10115824B2Oct 30, 2018
Forming a contact for a semiconductor device
IBM4 citations73
US10056334B2Aug 21, 2018
Dual metal-insulator-semiconductor contact structure and formulation method
IBM3 citations73
US10347581B2Jul 9, 2019
Contact formation in semiconductor devices
IBM3 citations72
GLOBALFOUNDRIES INC
11 patentsUS10192867B1Jan 29, 2019
Complementary FETs with wrap around contacts and method of forming same
GLOBALFOUNDRIES INC134 citations98
US9640636B1May 2, 2017
Methods of forming replacement gate structures and bottom and top source/drain regions on a vertical transistor device
GLOBALFOUNDRIES INC88 citations98
US9397003B1Jul 19, 2016
Method for forming source/drain contacts during CMOS integration using confined epitaxial growth techniques
GLOBALFOUNDRIES INC79 citations98
US10236292B1Mar 19, 2019
Complementary FETs with wrap around contacts and methods of forming same
GLOBALFOUNDRIES INC33 citations93
US9911738B1Mar 6, 2018
Vertical-transport field-effect transistors with a damascene gate strap
GLOBALFOUNDRIES INC18 citations86
US10141446B2Nov 27, 2018
Formation of bottom junction in vertical FET devices
GLOBALFOUNDRIES INC5 citations84
US10236218B1Mar 19, 2019
Methods, apparatus and system for forming wrap-around contact with dual silicide
GLOBALFOUNDRIES INC19 citations83
US9842933B1Dec 12, 2017
Formation of bottom junction in vertical FET devices
GLOBALFOUNDRIES INC4 citations73
US9640535B2May 2, 2017
Method for forming source/drain contacts during CMOS integration using confined epitaxial growth techniques and the resulting semiconductor devices
GLOBALFOUNDRIES INC4 citations73
US9543216B2Jan 10, 2017
Integration of hybrid germanium and group III-V contact epilayer in CMOS
GLOBALFOUNDRIES INC5 citations73
US10475904B2Nov 12, 2019
Methods of forming merged source/drain regions on integrated circuit products
GLOBALFOUNDRIES INC5 citations72
CHAMBERS JAMES JOSEPH
2 patentsUS8643113B2Feb 4, 2014
Structure and method for metal gate stack oxygen concentration control using an oxygen diffusion barrier layer and a sacrificial oxygen gettering layer
CHAMBERS JAMES JOSEPH14 citations92
US8536654B2Sep 17, 2013
Structure and method for dual work function metal gate CMOS with selective capping
CHAMBERS JAMES JOSEPH5 citations83
PANASONIC CORP
1 patentNIIMI HIROAKI
1 patentBEVAN MALCOLM J
1 patentTOKYO ELECTRON LTD
1 patentShowing the top 50 of 127 patents by PatentIndex Score.