Inventor
NUNOMURA NOBUHIDE
JP4 patents
⚠️ This page may combine multiple inventors who share the name “NUNOMURA NOBUHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
3 patentsUSD864885SOct 29, 2019
Infrared lamp heater transmission window for semiconductor manufacturing apparatus
HITACHI HIGH TECH CORP24 citations92
US10121686B2Nov 6, 2018
Vacuum processing apparatus
HITACHI HIGH TECH CORP7 citations82
USD907593SJan 12, 2021
Discharge chamber for a plasma processing apparatus
HITACHI HIGH TECH CORP9 citations79