USD864885SActiveUtility

Infrared lamp heater transmission window for semiconductor manufacturing apparatus

Assignee: HITACHI HIGH TECH CORPPriority: Nov 10, 2017Filed: Feb 27, 2018Granted: Oct 29, 2019

Est. expiryNov 10, 2037(~11.3 yrs left)· nominal 20-yr term from priority

Inventors:Michiaki Kobayashi Kazuyuki Hirozane Akio Harada Nobuhide Nunomura Yutaka Kouzuma

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for an infrared lamp heater transmission window for semiconductor manufacturing apparatus, as shown and described.

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