Inventor · disambiguated record
Hidehiro Yanagawa
Also filed as: YANAGAWA HIDEHIRO
5 granted patents·2 pending applications·1,001 citations·filing 1993–2010
87Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0196US7198447B2Semiconductor device producing apparatus and producing method of semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Apr 3, 2007·462 cites·11 claims
- 0295USRE43023EDual loading port semiconductor processing equipmentNAKASHIMA TAKANOBU·Filed 2010·Granted Dec 13, 2011·417 cites·20 claims
- 0392US6641350B2Dual loading port semiconductor processing equipmentHITACHI INT ELECTRIC INC·Filed 2001·Granted Nov 4, 2003·69 cites·9 claims
- 0458US5902103AVertical furnace of a semiconductor manufacturing apparatus and a boat cover thereofKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted May 11, 1999·26 cites·7 claims
- 0553US5277215AMethod for supplying and discharging gas to and from semiconductor manufacturing equipment and system for executing the sameKOKUSAI ELECTRIC CO LTD·Filed 1993·Granted Jan 11, 1994·27 cites·16 claims
- 0648US2010154711A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2009·Application pending·0 cites
- 0734US2002012581A1Substrate processing apparatus and method for manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →