Inventor
OKADA MITSUHIRO
JP114 patents
⚠️ This page may combine multiple inventors who share the name “OKADA MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
22 patentsUS9922824B2Mar 20, 2018
Method of forming silicon film
TOKYO ELECTRON LTD338 citations99
US7758920B2Jul 20, 2010
Method and apparatus for forming silicon-containing insulating film
TOKYO ELECTRON LTD81 citations98
US7462571B2Dec 9, 2008
Film formation method and apparatus for semiconductor process for forming a silicon nitride film
TOKYO ELECTRON LTD91 citations98
US8946065B2Feb 3, 2015
Method of forming seed layer and method of forming silicon-containing thin film
TOKYO ELECTRON LTD9 citations84
US7964516B2Jun 21, 2011
Film formation apparatus for semiconductor process and method for using same
TOKYO ELECTRON LTD9 citations84
USD620085SJul 20, 2010
Gas supply pipe for manufacturing semiconductor wafers
TOKYO ELECTRON LTD10 citations84
US7611995B2Nov 3, 2009
Method for removing silicon oxide film and processing apparatus
TOKYO ELECTRON LTD16 citations84
USD588078SMar 10, 2009
Heat dissipation deterrence link for semiconductor manufacture
TOKYO ELECTRON LTD13 citations84
US7416978B2Aug 26, 2008
Film forming method, film forming system and recording medium
TOKYO ELECTRON LTD14 citations84
US8343594B2Jan 1, 2013
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD8 citations83
US7713354B2May 11, 2010
Film forming method, film forming system and recording medium
TOKYO ELECTRON LTD6 citations74
US10570508B2Feb 25, 2020
Film forming apparatus, film forming method and heat insulating member
TOKYO ELECTRON LTD2 citations73
US9758865B2Sep 12, 2017
Silicon film forming method, thin film forming method and cross-sectional shape control method
TOKYO ELECTRON LTD4 citations73
US10460950B2Oct 29, 2019
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD2 citations72
US9540743B2Jan 10, 2017
Amorphous silicon crystallizing method, crystallized silicon film forming method, semiconductor device manufacturing method and film forming apparatus
TOKYO ELECTRON LTD3 citations68
US11551933B2Jan 10, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations63
US7696106B2Apr 13, 2010
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD6 citations62
US7211514B2May 1, 2007
Heat-processing method for semiconductor process under a vacuum pressure
TOKYO ELECTRON LTD3 citations62
US12482663B2Nov 25, 2025
Processing apparatus
TOKYO ELECTRON LTD0 citations61
US11600490B2Mar 7, 2023
Silicon film forming method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11251034B2Feb 15, 2022
Film forming method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US10892162B2Jan 12, 2021
Silicon film forming method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
MITSUBA CORP
7 patentsUS7575270B2Aug 18, 2009
Opening/closing apparatus for vehicle
MITSUBA CORP24 citations89
US10443288B2Oct 15, 2019
Roller unit and vehicular opening-closing body driving device
MITSUBA CORP2 citations73
US10075162B2Sep 11, 2018
Touch sensor unit
MITSUBA CORP3 citations73
US10370878B2Aug 6, 2019
Touch sensor unit
MITSUBA CORP2 citations68
US10745959B2Aug 18, 2020
Touch sensor unit
MITSUBA CORP2 citations67
US10023031B2Jul 17, 2018
Pulley apparatus
MITSUBA CORP4 citations67
US10745956B2Aug 18, 2020
Touch sensor unit and method of manufacturing the same
MITSUBA CORP1 citations63
HITACHI LTD
6 patentsUS9933976B2Apr 3, 2018
Storage apparatus and data processing method thereof, and storage system
HITACHI LTD9 citations83
US10459773B2Oct 29, 2019
PLD management method and PLD management system
HITACHI LTD7 citations81
US10725865B2Jul 28, 2020
Storage unit and storage device
HITACHI LTD4 citations73
US10310764B2Jun 4, 2019
Semiconductor memory device and storage apparatus comprising semiconductor memory device
HITACHI LTD2 citations73
US10467176B2Nov 5, 2019
Information processing apparatus
HITACHI LTD4 citations72
US10102070B2Oct 16, 2018
Information processing system, storage apparatus and storage device
HITACHI LTD5 citations72
OKADA MITSUHIRO
4 patentsUS8080109B2Dec 20, 2011
Film formation apparatus and method for using the same
OKADA MITSUHIRO8 citations82
US8857890B2Oct 14, 2014
Driving apparatus for opening and closing body for vehicle
OKADA MITSUHIRO7 citations81
US8222162B2Jul 17, 2012
Batch processing method for forming structure including amorphous carbon film
OKADA MITSUHIRO3 citations61
US8105970B2Jan 31, 2012
Olefin polymerization catalyst component and production process thereof, and production proces of olefin polymerization catalyst and olefin polymer
OKADA MITSUHIRO5 citations61
ALPS ELECTRIC CO LTD
4 patentsUS4920245AApr 24, 1990
A push-button switch with uniform on and off timings
ALPS ELECTRIC CO LTD8 citations73
US4748046AMay 31, 1988
Method of making keys of a keyboard
ALPS ELECTRIC CO LTD9 citations64
US6274834B1Aug 14, 2001
Push-button switch with part to a wire rod exposed to an inside bottom of housing to form a contact portion
ALPS ELECTRIC CO LTD2 citations63
US5034585AJul 23, 1991
Solder attachable push button switch
ALPS ELECTRIC CO LTD2 citations63
ADEKA CORP
2 patentsYAMAHA MOTOR CO LTD
1 patentWATANABE MASAHISA
1 patentSUMITOMO CHEMICAL CO
1 patentSANYO ELECTRIC CO
1 patentYAZAKI CORP
1 patentShowing the top 50 of 114 patents by PatentIndex Score.