Inventor
MIZUOCHI MASAKI
JP34 patents
⚠️ This page may combine multiple inventors who share the name “MIZUOCHI MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
28 patentsUS9502208B2Nov 22, 2016
Charged particle beam apparatus, stage controlling method, and stage system
HITACHI HIGH TECH CORP4 citations73
US9368320B2Jun 14, 2016
Stage apparatus, and charged particle beam apparatus using same
HITACHI HIGH TECH CORP3 citations73
US7763863B2Jul 27, 2010
Charged particle beam application apparatus
HITACHI HIGH TECH CORP7 citations73
USD989831SJun 20, 2023
Apparatus for evaluating semiconductor substrate
HITACHI HIGH TECH CORP2 citations72
US12573584B2Mar 10, 2026
Stage device, charged particle beam device, and vacuum device
HITACHI HIGH TECH CORP0 citations62
US10770259B2Sep 8, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP1 citations62
US8946652B2Feb 3, 2015
Sample positioning apparatus, sample stage, and charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations62
US6794665B2Sep 21, 2004
Electron beam drawing apparatus
HITACHI HIGH TECH CORP2 citations62
US12469671B2Nov 11, 2025
Stage apparatus and charged particle beam apparatus including stage apparatus
HITACHI HIGH TECH CORP0 citations61
USD989830SJun 20, 2023
Semiconductor substrate transfer apparatus
HITACHI HIGH TECH CORP0 citations61
USD989144SJun 13, 2023
Apparatus for evaluating semiconductor substrate
HITACHI HIGH TECH CORP1 citations61
US11049687B2Jun 29, 2021
Stage apparatus and charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations61
US11418101B2Aug 16, 2022
Linear motor for vacuum and vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations59
US10840059B2Nov 17, 2020
Charged particle radiation device
HITACHI HIGH TECH CORP1 citations57
US11380515B2Jul 5, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations56
US11342156B2May 24, 2022
Charged particle beam apparatus, sample alignment method of charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations52
US10804067B2Oct 13, 2020
Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage
HITACHI HIGH TECH CORP0 citations52
US10366912B2Jul 30, 2019
Stage apparatus and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations52
US9887064B2Feb 6, 2018
Stage device and charged particle beam device using the same
HITACHI HIGH TECH CORP0 citations52
US12578660B2Mar 17, 2026
Image capturing apparatus and image capturing method
HITACHI HIGH TECH CORP0 citations51
US12400826B2Aug 26, 2025
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US12014897B2Jun 18, 2024
Ventilated semiconductor processing apparatus
HITACHI HIGH TECH CORP0 citations51
US10879033B2Dec 29, 2020
Stage apparatus, and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US10658151B2May 19, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US10600614B2Mar 24, 2020
Stage device and charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US9627173B2Apr 18, 2017
Stage device and charged particle beam apparatus using the stage device
HITACHI HIGH TECH CORP0 citations51
US9734983B2Aug 15, 2017
Charged particle radiation apparatus
HITACHI HIGH TECH CORP0 citations48
US9905393B2Feb 27, 2018
Stage apparatus with braking system for lens, beam, or vibration compensation
HITACHI HIGH TECH CORP0 citations41