Inventor · disambiguated record
Arthur Winfried Eduardus Minnaert
Also filed as: MINNAERT ARTHUR WINFRIED E · MINNAERT ARTHUR WINFRIED EDUAR · MINNAERT ARTHUR WINFRIED EDUARDUS
8 granted patents·5 pending applications·281 citations·filing 2002–2020
88Inventor score
Top patents by PatentIndex Score
13 records- 0195US7359030B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 15, 2008·92 cites·19 claims
- 0295US7333174B2Lithographic apparatus and method for determining Z position errors/variations and substrate table flatnessASML NETHERLANDS BV·Filed 2005·Granted Feb 19, 2008·140 cites·25 claims
- 0384US9606445B2Lithographic apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·5 cites·21 claims
- 0481US7746484B2Method for positioning a target portion of a substrate with respect to a focal plane of a projection systemASML NETHERLANDS BV·Filed 2007·Granted Jun 29, 2010·7 cites·9 claims
- 0579US6618118B2Optical exposure method, device manufacturing method and lithographic projection apparatusASML NETHERLANDS BV·Filed 2002·Granted Sep 9, 2003·18 cites·22 claims
- 0676US6822730B2Substrate holder and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Nov 23, 2004·17 cites·18 claims
- 0774US7889357B2Method for positioning a target portion of a substrate with respect to a focal plane of a projection systemASML NETHERLANDS BV·Filed 2010·Granted Feb 15, 2011·2 cites·5 claims
- 0853US12174552B2Lithographic apparatus and electrostatic clamp designsASML HOLDING NV·Filed 2020·Granted Dec 24, 2024·0 cites·19 claims
- 0950US2008151204A1Method for positioning a target portion of a substrate with respect to a focal plane of a projection systemASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 1047US2009262320A1Method and Lithographic Apparatus for Acquiring Height Data Relating to a Substrate SurfaceASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 1142US2006139595A1Lithographic apparatus and method for determining Z position errors/variations and substrate table flatnessASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1238US2005041234A1Substrate holder and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1337US2011109889A1Method for positioning a target portion of a substrate with respect to a focal plane of a projection systemASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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