Inventor · disambiguated record
Earl William Ebert
Also filed as: EBERT EARL W · EBERT EARL WILLIAM · EBERT JR EARL WILLIAM
14 granted patents·3 pending applications·151 citations·filing 1989–2021
91Inventor score
Top patents by PatentIndex Score
17 records- 0193US8508736B2Tunable wavelength illumination systemDEN BOEF ARIE JEFFREY·Filed 2010·Granted Aug 13, 2013·9 cites·21 claims
- 0292US5187543ADifferential displacement measuring interferometerZYGO CORP·Filed 1990·Granted Feb 16, 1993·93 cites·36 claims
- 0388US9632434B2Reticle cooling system in a lithographic apparatusASML HOLDING NV·Filed 2015·Granted Apr 25, 2017·3 cites·20 claims
- 0487US8730476B2Tunable wavelength illumination systemASML HOLDING NV·Filed 2013·Granted May 20, 2014·4 cites·21 claims
- 0581US9632433B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2013·Granted Apr 25, 2017·2 cites·9 claims
- 0678US9766557B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted Sep 19, 2017·1 cites·13 claims
- 0773US7134321B2Fluid gauge proximity sensor and method of operating same using a modulated fluid flowASML HOLDING NV·Filed 2004·Granted Nov 14, 2006·15 cites·14 claims
- 0870US9891540B2Measuring method, measurement apparatus, lithographic apparatus and device manufacturing methodASML HOLDING NV·Filed 2015·Granted Feb 13, 2018·1 cites·24 claims
- 0963US12504699B2Charge dissipative reticle table cleaning reticleASML HOLDING NV·Filed 2021·Granted Dec 23, 2025·0 cites·14 claims
- 1061US9977351B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted May 22, 2018·0 cites·14 claims
- 1158US2014253891A1Tunable wavelength illumination systemASML HOLDING NV·Filed 2014·Application pending·0 cites
- 1257US7021121B2Gas gauge proximity sensor with a modulated gas flowASML HOLDING NV·Filed 2004·Granted Apr 4, 2006·7 cites·47 claims
- 1357US5028137AAngular displacement measuring interferometerZYGO CORP·Filed 1989·Granted Jul 2, 1991·16 cites·13 claims
- 1454US2015212432A1Reticle Heater to Keep Reticle Heating UniformASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
- 1553US12326670B2Lithographic apparatus, metrology system, and intensity imbalance measurement for error correctionASML HOLDING NV·Filed 2021·Granted Jun 10, 2025·0 cites·20 claims
- 1646US2015192856A1Heating and Cooling Systems in a Lithographic ApparatusASML NETHERLANDS BV·Filed 2015·Application pending·0 cites
- 1745USRE42650EFluid gauge proximity sensor and method of operating same using a modulated fluid flowASML HOLDING NV·Filed 2007·Granted Aug 30, 2011·0 cites·14 claims
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