Inventor · disambiguated record
Robert Marshall Stowell
Also filed as: STOWELL ROBERT M · STOWELL ROBERT MARSHALL
13 granted patents·2 pending applications·181 citations·filing 1992–2024
92Inventor score
Top patents by PatentIndex Score
15 records- 0194US10435807B2Lipseals and contact elements for semiconductor electroplating apparatusesNOVELLUS SYSTEMS INC·Filed 2015·Granted Oct 8, 2019·5 cites·7 claims
- 0294US9988734B2Lipseals and contact elements for semiconductor electroplating apparatusesNOVELLUS SYSTEMS INC·Filed 2015·Granted Jun 5, 2018·6 cites·22 claims
- 0393US10811299B2Wafer chuck assemblyLAM RES CORP·Filed 2018·Granted Oct 20, 2020·9 cites·21 claims
- 0487US11512408B2Lipseals and contact elements for semiconductor electroplating apparatusesNOVELLUS SYSTEMS INC·Filed 2018·Granted Nov 29, 2022·1 cites·17 claims
- 0585US12157950B2Lipseals and contact elements for semiconductor electroplating apparatusesNOVELLUS SYSTEMS INC·Filed 2022·Granted Dec 3, 2024·0 cites·20 claims
- 0684US5262643AAutomatic tip approach method and apparatus for scanning probe microscopeIBM·Filed 1992·Granted Nov 16, 1993·60 cites·30 claims
- 0780US2025130555A1In-situ sensor-fusion with artificial intelligenceLAM RES CORP·Filed 2024·Application pending·0 cites
- 0878US9816196B2Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyteNOVELLUS SYSTEMS INC·Filed 2013·Granted Nov 14, 2017·1 cites·19 claims
- 0967US12189369B2In-situ sensor-fusion with artificial intelligenceLAM RES CORP·Filed 2020·Granted Jan 7, 2025·0 cites·20 claims
- 1066US5360974ADual quad flexure scannerIBM·Filed 1992·Granted Nov 1, 1994·27 cites·5 claims
- 1165US7229339B2CMP apparatus and methodNOVELLUS SYSTEMS INC·Filed 2004·Granted Jun 12, 2007·12 cites·11 claims
- 1263US5801381AMethod for protecting a probe tip using active lateral scanning controlIBM·Filed 1997·Granted Sep 1, 1998·29 cites·17 claims
- 1363US2018030611A1Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyteNOVELLUS SYSTEMS INC·Filed 2017·Application pending·0 cites
- 1455US5260577ASample carriage for scanning probe microscopeIBM·Filed 1992·Granted Nov 9, 1993·11 cites·25 claims
- 1554US5773824AMethod for improving measurement accuracy using active lateral scanning control of a probeIBM·Filed 1997·Granted Jun 30, 1998·20 cites·19 claims
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