Inventor · disambiguated record
Emmanuel Guidotti
Also filed as: GUIDOTTI EMMANUEL · GUIDOTTI EMMANUEL P
11 granted patents·5 pending applications·193 citations·filing 1997–2018
91Inventor score
Top patents by PatentIndex Score
16 records- 0195US7459396B2Method for thin film deposition using multi-tray film precursor evaporation systemTOKYO ELECTRON LTD·Filed 2006·Granted Dec 2, 2008·25 cites·12 claims
- 0291US7270848B2Method for increasing deposition rates of metal layers from metal-carbonyl precursorsIBM·Filed 2004·Granted Sep 18, 2007·45 cites·15 claims
- 0390US7708835B2Film precursor tray for use in a film precursor evaporation system and method of usingTOKYO ELECTRON LTD·Filed 2006·Granted May 4, 2010·12 cites·26 claims
- 0479US7484315B2Replaceable precursor tray for use in a multi-tray solid precursor delivery systemTOKYO ELECTRON LTD·Filed 2004·Granted Feb 3, 2009·18 cites·24 claims
- 0578US6992011B2Method and apparatus for removing material from chamber and wafer surfaces by high temperature hydrogen-containing plasmaTOKYO ELECTRON LTD·Filed 2003·Granted Jan 31, 2006·25 cites·23 claims
- 0677US7638002B2Multi-tray film precursor evaporation system and thin film deposition system incorporating sameTOKYO ELECTRON LTD·Filed 2004·Granted Dec 29, 2009·14 cites·51 claims
- 0777US7488512B2Method for preparing solid precursor tray for use in solid precursor evaporation systemTOKYO ELECTRON LTD·Filed 2004·Granted Feb 10, 2009·15 cites·3 claims
- 0868US7678421B2Method for increasing deposition rates of metal layers from metal-carbonyl precursorsTOKYO ELECTRON LTD·Filed 2007·Granted Mar 16, 2010·2 cites·24 claims
- 0957US6121140AMethod of improving surface morphology and reducing resistivity of chemical vapor deposition-metal filmsTOKYO ELECTRON LTD·Filed 1997·Granted Sep 19, 2000·18 cites·17 claims
- 1054US6090705AMethod of eliminating edge effect in chemical vapor deposition of a metalTOKYO ELECTRON LTD·Filed 1998·Granted Jul 18, 2000·19 cites·34 claims
- 1151US2006185597A1Film precursor evaporation system and method of usingSUZUKI KENJI·Filed 2006·Application pending·0 cites
- 1249US2006182886A1Method and system for improved delivery of a precursor vapor to a processing zoneGUIDOTTI EMMANUEL P·Filed 2005·Application pending·0 cites
- 1348US11075057B2Device for treating an object with plasmaPLASMA THERM LLC·Filed 2018·Granted Jul 27, 2021·0 cites·3 claims
- 1439US2005279384A1Method and processing system for controlling a chamber cleaning processGUIDOTTI EMMANUEL P·Filed 2004·Application pending·0 cites
- 1538US2006068588A1Low-pressure deposition of ruthenium and rhenium metal layers from metal carbonyl precursorsIBM·Filed 2004·Application pending·0 cites
- 1635US2015243485A1Device for Treating an Object with PlasmaNANOPLAS·Filed 2013·Application pending·0 cites
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