Inventor
OHKASE WATARU
JP16 patents
⚠️ This page may combine multiple inventors who share the name “OHKASE WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL SAGAMI LTD
11 patentsUS5536918AJul 16, 1996
Heat treatment apparatus utilizing flat heating elements for treating semiconductor wafers
TEL SAGAMI LTD141 citations97
US5007788AApr 16, 1991
Pitch changing device for changing pitches of plate-like objects and method of changing pitches
TEL SAGAMI LTD74 citations96
US4950870AAug 21, 1990
Heat-treating apparatus
TEL SAGAMI LTD71 citations95
US5393349AFeb 28, 1995
Semiconductor wafer processing apparatus
TEL SAGAMI LTD43 citations92
US4955775ASep 11, 1990
Semiconductor wafer treating apparatus
TEL SAGAMI LTD30 citations92
US4952115AAug 28, 1990
Wafer support device
TEL SAGAMI LTD27 citations92
US4943235AJul 24, 1990
Heat-treating apparatus
TEL SAGAMI LTD23 citations92
US4938691AJul 3, 1990
Heat-treating apparatus
TEL SAGAMI LTD38 citations92
USD326272SMay 19, 1992
Heat insulating cylinder for thermal treatment of semiconductor wafers
TEL SAGAMI LTD9 citations74
USD326273SMay 19, 1992
Heat insulating cylinder for thermal treatment of semiconductor wafers
TEL SAGAMI LTD7 citations73
USD327078SJun 16, 1992
Instrument for transferring boats for thermal treatment of semiconductor wafers
TEL SAGAMI LTD2 citations62
TOKYO ELECTRON LTD
5 patentsUS5616264AApr 1, 1997
Method and apparatus for controlling temperature in rapid heat treatment system
TOKYO ELECTRON LTD565 citations98
US5443648AAug 22, 1995
Vertical heat treatment apparatus with a rotary holder turning independently of a liner plate
TOKYO ELECTRON LTD406 citations98
US6111225AAug 29, 2000
Wafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressures
TOKYO ELECTRON LTD181 citations97
US5520742AMay 28, 1996
Thermal processing apparatus with heat shielding member
TOKYO ELECTRON LTD117 citations97
US5763856AJun 9, 1998
Heat treatment apparatus and method
TOKYO ELECTRON LTD43 citations92