USD327078SExpiredUtility

Instrument for transferring boats for thermal treatment of semiconductor wafers

37
Assignee: TEL SAGAMI LTDPriority: Jul 25, 1988Filed: Jan 25, 1989Granted: Jun 16, 1992
Est. expiryJul 25, 2008(expired)· nominal 20-yr term from priority
Inventors:Ken NakaoSeishiro SatoWataru Ohkase
37
PatentIndex Score
2
Cited by
5
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for an instrument for transferring boats for thermal treatment of semiconductor wafers, as shown.

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