Inventor · disambiguated record
Ken Nakao
Also filed as: NAKAO KEN · NAKAO KEN-ICHIROU
44 granted patents·7 pending applications·1,866 citations·filing 1988–2012
98Inventor score
Top patents by PatentIndex Score
51 records- 0198US5813851AHeat treatment methodTOKYO ELECTRON LTD·Filed 1996·Granted Sep 29, 1998·496 cites·3 claims
- 0297US5097890AHeat treating apparatus with cooling fluid nozzlesTEL SAGAMI LTD·Filed 1990·Granted Mar 24, 1992·421 cites·5 claims
- 0394US7072578B2Carbon wire heating object sealing heater and fluid heating apparatus using the same heaterTOKYO ELECTRON LTD·Filed 2005·Granted Jul 4, 2006·44 cites·4 claims
- 0492US6407371B1HeaterTOSHIBA CERAMICS CO·Filed 1999·Granted Jun 18, 2002·106 cites·16 claims
- 0591US6043468ACarbon heaterTOSHIBA CERAMICS CO·Filed 1998·Granted Mar 28, 2000·114 cites·47 claims
- 0690US6062853AHeat-treating boat for semiconductor wafersTOKYO ELECTRON LTD·Filed 1997·Granted May 16, 2000·111 cites·10 claims
- 0788US4938691AHeat-treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Jul 3, 1990·38 cites·17 claims
- 0886US8167521B2Substrate transfer apparatus and vertical heat processing apparatusNAKAO KEN·Filed 2007·Granted May 1, 2012·11 cites·10 claims
- 0986US6885814B2Carbon wire heating object sealing heater and fluid heating apparatus using the same heaterTOKYO ELECTRON LTD·Filed 2003·Granted Apr 26, 2005·36 cites·27 claims
- 1085US8476560B2Thermal processing furnaceKOBAYASHI MAKOTO·Filed 2009·Granted Jul 2, 2013·9 cites·8 claims
- 1184US8197600B2Vaporizer and semiconductor processing systemNAKAO KEN·Filed 2008·Granted Jun 12, 2012·6 cites·19 claims
- 1283US7888622B2Heat-processing furnace and manufacturing method thereofTOKYO ELECTRON LTD·Filed 2007·Granted Feb 15, 2011·8 cites·8 claims
- 1379US8134100B2Heat processing furnace and method of manufacturing the sameKOBAYASHI MAKOTO·Filed 2008·Granted Mar 13, 2012·6 cites·8 claims
- 1477US5431561AMethod and apparatus for heat treatingTOSHIBA KK·Filed 1993·Granted Jul 11, 1995·25 cites·2 claims
- 1576US8033823B2Heat processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Oct 11, 2011·5 cites·4 claims
- 1676US7807587B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Oct 5, 2010·5 cites·6 claims
- 1776US4943235AHeat-treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Jul 24, 1990·23 cites·10 claims
- 1875US7311520B2Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Dec 25, 2007·17 cites·22 claims
- 1972US8470720B2Film forming apparatus and film forming methodNAKAO KEN·Filed 2009·Granted Jun 25, 2013·4 cites·7 claims
- 2072US7102104B2Heat treatment systemTOKYO ELECTRON LTD·Filed 2002·Granted Sep 5, 2006·14 cites·17 claims
- 2171US6584279B2Heater sealed with carbon wire heating elementTOSHIBA CERAMICS CO·Filed 2001·Granted Jun 24, 2003·15 cites·22 claims
- 2270US7207123B2Dry air-supplying apparatus and treating apparatusNICHIAS CORP·Filed 2003·Granted Apr 24, 2007·15 cites·15 claims
- 2368US5297956AMethod and apparatus for heat treatingTOSHIBA KK·Filed 1991·Granted Mar 29, 1994·17 cites·3 claims
- 2467US7862638B2Gas supply system for semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Jan 4, 2011·2 cites·6 claims
- 2567US5324920AHeat treatment apparatusTEL SAGAMI LTD·Filed 1991·Granted Jun 28, 1994·42 cites·14 claims
- 2665US4937434AHeat treatment apparatus and heat treatment methodTEL SAGAMI LTD·Filed 1989·Granted Jun 26, 1990·30 cites·9 claims
- 2764US6582649B1Parsion stabilizing method and system therefor for blow-molding machineJAPAN STEEL WORKS LTD·Filed 2000·Granted Jun 24, 2003·7 cites·2 claims
- 2864US5645419AHeat treatment method and deviceTOKYO ELECTRON LTD·Filed 1995·Granted Jul 8, 1997·31 cites·10 claims
- 2963US6515264B2HeaterTOSHIBA CERAMICS CO·Filed 2002·Granted Feb 4, 2003·8 cites·6 claims
- 3062US6008477AHeat treatment apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Dec 28, 1999·27 cites·20 claims
- 3162USD326272SHeat insulating cylinder for thermal treatment of semiconductor wafersTEL SAGAMI LTD·Filed 1989·Granted May 19, 1992·9 cites·1 claims
- 3260US5013594AOptical information recording medium and its productionHITACHI MAXELL·Filed 1988·Granted May 7, 1991·18 cites·10 claims
- 3358US6204488B1Sealing terminalTOSHIBA CERAMICS CO·Filed 1999·Granted Mar 20, 2001·23 cites·16 claims
- 3457US7150628B2Single-wafer type heat treatment apparatus for semiconductor processing systemTOKYO ELECTRON LTD·Filed 2004·Granted Dec 19, 2006·5 cites·22 claims
- 3555USD326273SHeat insulating cylinder for thermal treatment of semiconductor wafersTEL SAGAMI LTD·Filed 1989·Granted May 19, 1992·7 cites·1 claims
- 3654US5500388AHeat treatment process for wafersTOKYO ELECTRON LTD·Filed 1994·Granted Mar 19, 1996·26 cites·13 claims
- 3754US5239614ASubstrate heating method utilizing heating element control to achieve horizontal temperature gradientTEL SAGAMI LTD·Filed 1991·Granted Aug 24, 1993·27 cites·16 claims
- 3851US5323484AHeating apparatus with multilayer insulating structureTEL SAGAMI LTD·Filed 1993·Granted Jun 21, 1994·14 cites·13 claims
- 3949US5229576AHeating apparatusTEL SAGAMI LTD·Filed 1992·Granted Jul 20, 1993·20 cites·10 claims
- 4048US5234501AOxidation metodTEL SAGAMI LTD·Filed 1992·Granted Aug 10, 1993·22 cites·16 claims
- 4147US2009246542A1Plasma process apparatus, plasma process method, and object processed by the plasma process methodUNIV NAGOYA NAT UNIV CORP·Filed 2009·Application pending·0 cites
- 4247US2008295963A1Gas supply system and gas supply accumulation unit of semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 4346US2007048145A1Vacuum evacuation device and method, and substrate processing apparatus and methodISHII KATSUTOSHI·Filed 2006·Application pending·0 cites
- 4444US8546185B2Method for manufacturing semiconductor deviceNAKAO KEN·Filed 2012·Granted Oct 1, 2013·0 cites·3 claims
- 4543US2008105194A1Gas supply system, gas supply method, method of cleaning thin film forming apparatus, thin film forming method and thin film forming apparatusNAKAO KEN·Filed 2007·Application pending·0 cites
- 4641US8387559B2Semiconductor manufacturing plantHIRAIWA JIRO·Filed 2007·Granted Mar 5, 2013·0 cites·13 claims
- 4739US2005121142A1Thermal processing apparatus and a thermal processing methodFiled 2004·Application pending·0 cites
- 4839US2014174364A1Heat treatment deviceNAKAO KEN·Filed 2012·Application pending·0 cites
- 4937US7336892B2Reflection plate for semiconductor heat treatment and manufacturing method thereofCOVALENT MATERIALS CORP·Filed 2003·Granted Feb 26, 2008·0 cites·18 claims
- 5037USD327078SInstrument for transferring boats for thermal treatment of semiconductor wafersTEL SAGAMI LTD·Filed 1989·Granted Jun 16, 1992·2 cites·1 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →