Inventor · disambiguated record
Wataru Ohkase
Also filed as: OHKASE WATARU
16 granted patents·1,777 citations·filing 1988–1997
96Inventor score
Top patents by PatentIndex Score
16 records- 0197US5616264AMethod and apparatus for controlling temperature in rapid heat treatment systemTOKYO ELECTRON LTD·Filed 1994·Granted Apr 1, 1997·565 cites·16 claims
- 0297US5443648AVertical heat treatment apparatus with a rotary holder turning independently of a liner plateTOKYO ELECTRON LTD·Filed 1994·Granted Aug 22, 1995·406 cites·8 claims
- 0392US6111225AWafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressuresTOKYO ELECTRON LTD·Filed 1997·Granted Aug 29, 2000·181 cites·14 claims
- 0490US5536918AHeat treatment apparatus utilizing flat heating elements for treating semiconductor wafersTEL SAGAMI LTD·Filed 1994·Granted Jul 16, 1996·141 cites·2 claims
- 0588US5520742AThermal processing apparatus with heat shielding memberTOKYO ELECTRON LTD·Filed 1994·Granted May 28, 1996·117 cites·24 claims
- 0688US4950870AHeat-treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Aug 21, 1990·71 cites·6 claims
- 0788US4938691AHeat-treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Jul 3, 1990·38 cites·17 claims
- 0886US5007788APitch changing device for changing pitches of plate-like objects and method of changing pitchesTEL SAGAMI LTD·Filed 1989·Granted Apr 16, 1991·74 cites·6 claims
- 0978US5763856AHeat treatment apparatus and methodTOKYO ELECTRON LTD·Filed 1996·Granted Jun 9, 1998·43 cites·4 claims
- 1076US4943235AHeat-treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Jul 24, 1990·23 cites·10 claims
- 1170US4955775ASemiconductor wafer treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Sep 11, 1990·30 cites·5 claims
- 1269US5393349ASemiconductor wafer processing apparatusTEL SAGAMI LTD·Filed 1993·Granted Feb 28, 1995·43 cites·7 claims
- 1363US4952115AWafer support deviceTEL SAGAMI LTD·Filed 1989·Granted Aug 28, 1990·27 cites·7 claims
- 1462USD326272SHeat insulating cylinder for thermal treatment of semiconductor wafersTEL SAGAMI LTD·Filed 1989·Granted May 19, 1992·9 cites·1 claims
- 1555USD326273SHeat insulating cylinder for thermal treatment of semiconductor wafersTEL SAGAMI LTD·Filed 1989·Granted May 19, 1992·7 cites·1 claims
- 1637USD327078SInstrument for transferring boats for thermal treatment of semiconductor wafersTEL SAGAMI LTD·Filed 1989·Granted Jun 16, 1992·2 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →