Inventor · disambiguated record
John S. Graves
Also filed as: GRAVES III JOHN S · GRAVES JOHN S
6 granted patents·31 citations·filing 2010–2023
79Inventor score
Top patents by PatentIndex Score
6 records- 0189US11966156B2Lithography mask repair by simulation of photoresist thickness evolutionKLA CORP·Filed 2023·Granted Apr 23, 2024·3 cites·31 claims
- 0284US8589827B2Photoresist simulationBIAFORE JOHN J·Filed 2010·Granted Nov 19, 2013·13 cites·9 claims
- 0382US10007191B2Method for computer modeling and simulation of negative-tone-developable photoresistsKLA TENCOR CORP·Filed 2016·Granted Jun 26, 2018·3 cites·34 claims
- 0476US8428762B2Spin coating modelingGRAVES JOHN S·Filed 2010·Granted Apr 23, 2013·9 cites·10 claims
- 0574US9679116B2Photoresist simulationKLA TENCOR CORP·Filed 2013·Granted Jun 13, 2017·3 cites·9 claims
- 0654US12406197B2Prediction and metrology of stochastic photoresist thickness defectsKLA CORP·Filed 2021·Granted Sep 2, 2025·0 cites·19 claims
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