Inventor · disambiguated record
Garry Rose
Also filed as: ROSE GARRY · ROSE GARRY A · Rose Garry Allen
8 granted patents·5 pending applications·35 citations·filing 1992–2025
82Inventor score
Top patents by PatentIndex Score
13 records- 0177US9573111B1High purity ozone generator for optics cleaning and recoveryKLA TENCOR CORP·Filed 2013·Granted Feb 21, 2017·3 cites·9 claims
- 0268US10692692B2System and method for providing a clean environment in an electron-optical systemKLA TENCOR CORP·Filed 2016·Granted Jun 23, 2020·1 cites·17 claims
- 0368US9842724B2Method and system for imaging of a photomask through a pellicleKLA TENCOR CORP·Filed 2016·Granted Dec 12, 2017·1 cites·26 claims
- 0468US9662688B2Apparatus and method for cross-flow purge for optical components in a chamberKLA TENCOR CORP·Filed 2013·Granted May 30, 2017·1 cites·16 claims
- 0561US2025178042A1Supercritical Fluid Cleaning for Components in Optical or Electron Beam SystemsKLA CORP·Filed 2025·Application pending·0 cites
- 0661US2023191461A1Supercritical Fluid Cleaning for Components in Optical or Electron Beam SystemsKLA CORP·Filed 2022·Application pending·0 cites
- 0757US9891356B1Spectral purity filters (SPF), support structures for SPF films and corresponding methods of manufactureKLA TENCOR CORP·Filed 2015·Granted Feb 13, 2018·1 cites·42 claims
- 0849US11624904B2Vapor as a protectant and lifetime extender in optical systemsKLA CORP·Filed 2019·Granted Apr 11, 2023·0 cites·12 claims
- 0943US2014168758A1Carbon as grazing incidence euv mirror and spectral purity filterKLA TENCOR CORP·Filed 2013·Application pending·0 cites
- 1043US2013255717A1System and method for cleaning surfaces and components of mask and wafer inspection systems based on the positive column of a glow discharge plasmaKLA TENCOR CORP·Filed 2013·Application pending·0 cites
- 1140US5261857ACeiling vent with movable vanePETTERSON BART·Filed 1992·Granted Nov 16, 1993·18 cites·21 claims
- 1239US2014158914A1Optical component with blocking surface and method thereofSANDIA CORP·Filed 2013·Application pending·0 cites
- 1331US5393105ADuctwork for delivery of low temperature airFiled 1992·Granted Feb 28, 1995·10 cites·19 claims
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