Inventor
TANAKA KAZUUMI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA KAZUUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUSD1008986SDec 26, 2023
Ion shield plate for plasma processing apparatus
HITACHI HIGH TECH CORP7 citations83
USD868995SDec 3, 2019
Gas diffusion plate for a plasma processing apparatus
HITACHI HIGH TECH CORP13 citations81
USD958401SJul 19, 2022
Ion shield plate for plasma processing device
HITACHI HIGH TECH CORP4 citations68
US11710619B2Jul 25, 2023
Vacuum processing apparatus
HITACHI HIGH TECH CORP1 citations60