Inventor
TAKEWAKI MOTOYA
JP15 patents
⚠️ This page may combine multiple inventors who share the name “TAKEWAKI MOTOYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
12 patentsUSD824440SJul 31, 2018
Heater of substrate processing apparatus
HITACHI INT ELECTRIC INC7 citations83
USD790490SJun 27, 2017
Reaction tube
HITACHI INT ELECTRIC INC6 citations83
US10340151B2Jul 2, 2019
Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC2 citations72
USD823363SJul 17, 2018
Heater of substrate processing apparatus
HITACHI INT ELECTRIC INC5 citations72
USD803075SNov 21, 2017
Thermometry tool for substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations72
US9587884B2Mar 7, 2017
Insulation structure and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC2 citations72
US10415136B2Sep 17, 2019
Substrate processing apparatus including heating and cooling device, and ceiling part included in the same
HITACHI INT ELECTRIC INC1 citations62
US10228291B2Mar 12, 2019
Substrate processing apparatus, and thermocouple
HITACHI INT ELECTRIC INC1 citations62
US10684174B2Jun 16, 2020
Substrate processing apparatus, and thermocouple
HITACHI INT ELECTRIC INC0 citations51
USD786951SMay 16, 2017
Reaction tube
HITACHI INT ELECTRIC INC0 citations51
USD778742SFeb 14, 2017
Protector tube for thermocouple
HITACHI INT ELECTRIC INC0 citations51
USD778741SFeb 14, 2017
Protector tube for thermocouple
HITACHI INT ELECTRIC INC1 citations51
KOKUSAI ELECTRIC CORP
3 patentsUS12050138B2Jul 30, 2024
Substrate processing apparatus, and thermocouple
KOKUSAI ELECTRIC CORP2 citations72
US11300456B2Apr 12, 2022
Substrate processing apparatus, and thermocouple
KOKUSAI ELECTRIC CORP3 citations72
US11913116B2Feb 27, 2024
Substrate processing apparatus and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62