Inventor · disambiguated record
James Tsacoyeanes
Also filed as: TSACOYEANES JAMES · TSACOYEANES JAMES G
16 granted patents·2 pending applications·443 citations·filing 2000–2010
93Inventor score
Top patents by PatentIndex Score
18 records- 0198US6509952B1Method and system for selective linewidth optimization during a lithographic processSILICON VALLEY GROUP·Filed 2000·Granted Jan 21, 2003·322 cites·15 claims
- 0283US6813003B2Advanced illumination system for use in microlithographyFiled 2002·Granted Nov 2, 2004·18 cites·96 claims
- 0381US6573975B2DUV scanner linewidth control by mask error factor compensationFiled 2001·Granted Jun 3, 2003·23 cites·21 claims
- 0476US6922230B2DUV scanner linewidth control by mask error factor compensationASML HOLDING NV·Filed 2003·Granted Jul 26, 2005·16 cites·12 claims
- 0575US6775069B2Advanced illumination system for use in microlithographyASML HOLDING NV·Filed 2002·Granted Aug 10, 2004·18 cites·18 claims
- 0674US7187430B2Advanced illumination system for use in microlithographyASML HOLDING NV·Filed 2004·Granted Mar 6, 2007·10 cites·30 claims
- 0768US8013979B2Illumination system with low telecentricity error and dynamic telecentricity correctionASML HOLDING NV·Filed 2007·Granted Sep 6, 2011·2 cites·25 claims
- 0868US6819402B2System and method for laser beam expansionASML HOLDING NV·Filed 2002·Granted Nov 16, 2004·8 cites·17 claims
- 0963US6888615B2System and method for improving linewidth control in a lithography device by varying the angular distribution of light in an illuminator as a function of field positionASML HOLDING NV·Filed 2002·Granted May 3, 2005·9 cites·27 claims
- 1057US7142353B2System and method utilizing an electrooptic modulatorASML HOLDING NV·Filed 2004·Granted Nov 28, 2006·5 cites·23 claims
- 1153US2007146674A1Advanced Illumination System for Use in MicrolithographyASML HOLDING NV·Filed 2007·Application pending·0 cites
- 1252US7385750B2Spatial light modulator using an integrated circuit actuatorASML HOLDING NV·Filed 2003·Granted Jun 10, 2008·8 cites·13 claims
- 1351US7876420B2System and method utilizing an electrooptic modulatorASML HOLDING NV·Filed 2004·Granted Jan 25, 2011·2 cites·53 claims
- 1448US6784976B2System and method for improving line width control in a lithography device using an illumination system having pre-numerical aperture controlASML HOLDING NV·Filed 2002·Granted Aug 31, 2004·2 cites·33 claims
- 1546US8879045B2Method utilizing an electrooptic modulatorTSACOYEANES JAMES G·Filed 2010·Granted Nov 4, 2014·0 cites·14 claims
- 1643US7006198B2System and method for laser beam expansionASML HOLDING NV·Filed 2004·Granted Feb 28, 2006·0 cites·15 claims
- 1740US2006164711A1System and method utilizing an electrooptic modulatorASML HOLDING NV·Filed 2005·Application pending·0 cites
- 1838US7525718B2Spatial light modulator using an integrated circuit actuator and method of making and using sameASML HOLDING NV·Filed 2008·Granted Apr 28, 2009·0 cites·26 claims
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