Inventor
EBIHARA AKIMITSU
JP53 patents
⚠️ This page may combine multiple inventors who share the name “EBIHARA AKIMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
34 patentsUS8027027B2Sep 27, 2011
Exposure apparatus, and device manufacturing method
NIKON CORP48 citations99
US7486385B2Feb 3, 2009
Exposure apparatus, and device manufacturing method
NIKON CORP96 citations99
US7321419B2Jan 22, 2008
Exposure apparatus, and device manufacturing method
NIKON CORP112 citations99
US6437463B1Aug 20, 2002
Wafer positioner with planar motor and mag-lev fine stage
NIKON CORP135 citations99
US6246204B1Jun 12, 2001
Electromagnetic alignment and scanning apparatus
NIKON CORP94 citations99
US6323935B1Nov 27, 2001
Electromagnetic alignment and scanning apparatus
NIKON CORP65 citations97
US6693402B2Feb 17, 2004
Electromagnetic alignment and scanning apparatus
NIKON CORP24 citations96
US6329780B1Dec 11, 2001
Electromagnetic alignment and scanning apparatus
NIKON CORP28 citations96
US6255796B1Jul 3, 2001
Electromagnetic alignment and scanning apparatus
NIKON CORP44 citations96
US6255795B1Jul 3, 2001
Electromagnetic alignment and scanning apparatus
NIKON CORP23 citations96
US6252370B1Jun 26, 2001
Electromagnetic alignment and scanning apparatus
NIKON CORP38 citations96
US5996437ADec 7, 1999
Precision motion stage with single guide beam and follower stage
NIKON CORP62 citations95
US9274437B2Mar 1, 2016
Exposure apparatus and device manufacturing method
NIKON CORP6 citations93
US8018575B2Sep 13, 2011
Exposure apparatus, and device manufacturing method
NIKON CORP11 citations93
US6391503B2May 21, 2002
Scanning exposure methods
NIKON CORP37 citations93
US6281643B1Aug 28, 2001
Stage apparatus
NIKON CORP17 citations93
US5806193ASep 15, 1998
Tilt and movement apparatus using flexure and air cylinder
NIKON CORP41 citations93
US5726542AMar 10, 1998
Stage apparatus
NIKON CORP26 citations93
US9810995B2Nov 7, 2017
Exposure apparatus and device manufacturing method
NIKON CORP3 citations84
US9551943B2Jan 24, 2017
Exposure apparatus and device manufacturing method
NIKON CORP3 citations84
US6969966B2Nov 29, 2005
Electromagnetic alignment and scanning apparatus
NIKON CORP11 citations82
US7812925B2Oct 12, 2010
Exposure apparatus, and device manufacturing method
NIKON CORP3 citations74
US7573225B2Aug 11, 2009
Electromagnetic alignment and scanning apparatus
NIKON CORP4 citations74
US7012398B2Mar 14, 2006
Electromagnetic alignment and scanning apparatus
NIKON CORP5 citations74
US6844695B2Jan 18, 2005
Electromagnetic alignment and scanning apparatus
NIKON CORP3 citations74
US10191388B2Jan 29, 2019
Exposure apparatus, and device manufacturing method
NIKON CORP1 citations73
US10007188B2Jun 26, 2018
Exposure apparatus and device manufacturing method
NIKON CORP1 citations63
US9025129B2May 5, 2015
Exposure apparatus, and device manufacturing method
NIKON CORP0 citations63
US9019473B2Apr 28, 2015
Exposure apparatus and device manufacturing method
NIKON CORP0 citations63
US9001307B2Apr 7, 2015
Exposure apparatus and device manufacturing method
NIKON CORP0 citations63
US8724085B2May 13, 2014
Exposure apparatus, and device manufacturing method
NIKON CORP0 citations63
US8717537B2May 6, 2014
Exposure apparatus, and device manufacturing method
NIKON CORP0 citations63
US8692976B2Apr 8, 2014
Exposure apparatus, and device manufacturing method
NIKON CORP0 citations63
US6844696B2Jan 18, 2005
Electromagnetic alignment and scanning apparatus
NIKON CORP1 citations63
EBIHARA AKIMITSU
10 patentsUS8436979B2May 7, 2013
Exposure apparatus, and device manufacturing method
EBIHARA AKIMITSU7 citations92
US8767172B2Jul 1, 2014
Projection optical device and exposure apparatus
EBIHARA AKIMITSU8 citations84
US8681314B2Mar 25, 2014
Stage device and coordinate correction method for the same, exposure apparatus, and device manufacturing method
EBIHARA AKIMITSU5 citations73
US8830445B2Sep 9, 2014
Exposure apparatus, and device manufacturing method
EBIHARA AKIMITSU0 citations63
US8767177B2Jul 1, 2014
Exposure apparatus, and device manufacturing method
EBIHARA AKIMITSU0 citations63
US8705001B2Apr 22, 2014
Exposure apparatus, and device manufacturing method
EBIHARA AKIMITSU0 citations63
US8436978B2May 7, 2013
Exposure apparatus, and device manufacturing method
EBIHARA AKIMITSU0 citations63
US8319941B2Nov 27, 2012
Exposure apparatus, and device manufacturing method
EBIHARA AKIMITSU0 citations63
US8674586B2Mar 18, 2014
Motor device, apparatus and driving method for rotor
EBIHARA AKIMITSU0 citations52
US8436981B2May 7, 2013
Exposing method, exposure apparatus, and device fabricating method
EBIHARA AKIMITSU0 citations52
NIPPON KOGAKU KK
2 patentsMINOLTA CO LTD
2 patentsNIKON PRECISION INC
1 patentNIKON CORP JAPAN
1 patentShowing the top 50 of 53 patents by PatentIndex Score.