P

Inventor

JUNG DONG RAK

KR8 patents
⚠️ This page may combine multiple inventors who share the name “JUNG DONG RAK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM IP HOLDING BV

3 patents
USD876504SFeb 25, 2020

Exhaust flow control ring for semiconductor deposition apparatus

ASM IP HOLDING BV393 citations96
US11993843B2May 28, 2024

Substrate processing apparatus

ASM IP HOLDING BV2 citations70
US11205585B2Dec 21, 2021

Substrate processing apparatus and method of operating the same

ASM IP HOLDING BV0 citations49

PARK HYUNG SANG

2 patents
US8092606B2Jan 10, 2012

Deposition apparatus

PARK HYUNG SANG345 citations97
US8747948B2Jun 10, 2014

Deposition apparatus

PARK HYUNG SANG1 citations51

ASM GENITECH KOREA LTD

1 patent
USD614593SApr 27, 2010

Substrate support for a semiconductor deposition apparatus

ASM GENITECH KOREA LTD614 citations98

KIM KI JONG

1 patent
US8778083B2Jul 15, 2014

Lateral-flow deposition apparatus and method of depositing film by using the apparatus

KIM KI JONG7 citations81

KIM SE YONG

1 patent
US8273178B2Sep 25, 2012

Thin film deposition apparatus and method of maintaining the same

KIM SE YONG1 citations45