Inventor · disambiguated record
Robert Haney
Also filed as: HANEY ROBERT · HANEY ROBERT M
3 granted patents·4 pending applications·153 citations·filing 1975–2013
75Inventor score
Top patents by PatentIndex Score
7 records- 0191US4064945AElectronic depth control systemCASE CO J I·Filed 1975·Granted Dec 27, 1977·58 cites·10 claims
- 0283US6395363B1Sloped substrate supportAPPLIED MATERIALS INC·Filed 1996·Granted May 28, 2002·88 cites·18 claims
- 0373US7813895B2Methods for plasma matching between different chambers and plasma stability monitoring and controlAPPLIED MATERIALS INC·Filed 2007·Granted Oct 12, 2010·7 cites·22 claims
- 0463US2014076354A1Removing residues from substrate processing componentsQUANTUM GLOBAL TECH LLC·Filed 2013·Application pending·0 cites
- 0558US2012107520A1Removing Residues from Substrate Processing ComponentsWEST BRIAN T·Filed 2012·Application pending·0 cites
- 0658US2008092806A1Removing residues from substrate processing componentsAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0737US2005238807A1Refurbishment of a coated chamber componentAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
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