Inventor · disambiguated record
Frits Gubbels
Also filed as: GUBBELS FRITS · GUBBELS FRITS G H M
2 granted patents·3 citations·filing 2007–2012
38Inventor score
Top patents by PatentIndex Score
2 records- 0165US7959310B2Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical elementZEISS CARL SMT GMBH·Filed 2007·Granted Jun 14, 2011·3 cites·28 claims
- 0235US9192039B2Radiation sourceKEMPEN ANTONIUS THEODORUS WILHELMUS·Filed 2012·Granted Nov 17, 2015·0 cites·12 claims
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