Inventor · disambiguated record
Helmut Aschner
Also filed as: ASCHNER HELMUT
4 granted patents·2 pending applications·198 citations·filing 1997–2016
81Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0186US6005226ARapid thermal processing (RTP) system with gas driven rotating substrateSTEAG RTP SYSTEMS·Filed 1997·Granted Dec 21, 1999·121 cites·26 claims
- 0264US6449428B2Gas driven rotating susceptor for rapid thermal processing (RTP) systemMATTSON TECHNOLOGY CORP·Filed 1998·Granted Sep 10, 2002·38 cites·11 claims
- 0360US5870526AInflatable elastomeric element for rapid thermal processing (RTP) systemSTEAG AST·Filed 1997·Granted Feb 9, 1999·28 cites·21 claims
- 0442US6752625B1Method and apparatus device for the heat treatment of substratesSTEAG RTP SYSTEMS GMBH·Filed 1999·Granted Jun 22, 2004·11 cites·12 claims
- 0539US2007098904A1Device and method for the reduction of particles in the thermal treatment of rotating substratesASCHNER HELMUT·Filed 2006·Application pending·0 cites
- 0634US2018366352A1Method and device for the thermal treatment of substrates and holding unit for substratesCENTROTHERM INT AG·Filed 2016·Application pending·0 cites
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