Inventor · disambiguated record
Noriiki Masuda
Also filed as: MASUDA NORIIKI
5 granted patents·7 pending applications·64 citations·filing 2003–2024
79Inventor score
Top patents by PatentIndex Score
12 records- 0190US9466506B2Substrate processing system, gas supply unit, method of substrate processing, computer program, and storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Oct 11, 2016·15 cites·7 claims
- 0289US8430962B2Gas supply device, substrate processing apparatus and substrate processing methodMASUDA NORIIKI·Filed 2008·Granted Apr 30, 2013·38 cites·20 claims
- 0386US8679255B2Gas supply device, substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2013·Granted Mar 25, 2014·9 cites·8 claims
- 0480US12474686B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Granted Nov 18, 2025·0 cites·19 claims
- 0578US10921773B2Temperature control methodTOKYO ELECTRON LTD·Filed 2016·Granted Feb 16, 2021·2 cites·7 claims
- 0663US2021132575A1Temperature control methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0758US2025006516A1Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0847US2021343503A1Etching apparatus and etching methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0946US2008066868A1Focus ring and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1045US2008078746A1Substrate processing system, gas supply unit, method of substrate processing, computer program, and storage mediumMASUDA NORIIKI·Filed 2007·Application pending·0 cites
- 1143US2021035831A1Substrate position detecting method, substrate position adjusting method, and substrate position detecting apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1237US2003192857A1Method of etching and apparatus for doing sameTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →