Inventor
BEHDJAT MEHRAN
US40 patents
⚠️ This page may combine multiple inventors who share the name “BEHDJAT MEHRAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
27 patentsUSD793526SAug 1, 2017
Showerhead for a semiconductor processing chamber
APPLIED MATERIALS INC302 citations99
US7860379B2Dec 28, 2010
Temperature measurement and control of wafer support in thermal processing chamber
APPLIED MATERIALS INC27 citations92
US7972441B2Jul 5, 2011
Thermal oxidation of silicon using ozone
APPLIED MATERIALS INC22 citations91
USD807481SJan 9, 2018
Patterned heater pedestal
APPLIED MATERIALS INC15 citations84
US9330955B2May 3, 2016
Support ring with masked edge
APPLIED MATERIALS INC10 citations84
US9659809B2May 23, 2017
Support cylinder for thermal processing chamber
APPLIED MATERIALS INC6 citations83
US8888916B2Nov 18, 2014
Thermal reactor with improved gas flow distribution
APPLIED MATERIALS INC6 citations82
USD1066440SMar 11, 2025
Process chamber pumping liner
APPLIED MATERIALS INC2 citations73
US10373859B2Aug 6, 2019
Support ring with masked edge
APPLIED MATERIALS INC2 citations73
US10056286B2Aug 21, 2018
Support ring with masked edge
APPLIED MATERIALS INC2 citations73
US9842759B2Dec 12, 2017
Support ring with masked edge
APPLIED MATERIALS INC2 citations73
US10128144B2Nov 13, 2018
Support cylinder for thermal processing chamber
APPLIED MATERIALS INC2 citations72
US10665476B2May 26, 2020
Substrate processing system, valve assembly, and processing method
APPLIED MATERIALS INC2 citations71
US10000847B2Jun 19, 2018
Graphite susceptor
APPLIED MATERIALS INC2 citations71
US10453718B2Oct 22, 2019
Slit valve door with moving mating part
APPLIED MATERIALS INC1 citations63
US8896837B1Nov 25, 2014
Test apparatus for reflective cavity characterization
APPLIED MATERIALS INC2 citations63
USD1089130SAug 19, 2025
Process chamber manifold
APPLIED MATERIALS INC1 citations62
US9385004B2Jul 5, 2016
Support cylinder for thermal processing chamber
APPLIED MATERIALS INC1 citations62
USD1112376SFeb 10, 2026
Process chamber mixer
APPLIED MATERIALS INC0 citations60
US11021794B2Jun 1, 2021
Graphite susceptor
APPLIED MATERIALS INC0 citations60
US10741428B2Aug 11, 2020
Semiconductor processing chamber
APPLIED MATERIALS INC1 citations57
US11694919B2Jul 4, 2023
Vacuum chuck pressure control system
APPLIED MATERIALS INC0 citations52
US9514969B2Dec 6, 2016
Apparatus for reducing the effect of contamination on a rapid thermal process
APPLIED MATERIALS INC0 citations52
US9140647B2Sep 22, 2015
Test apparatus for reflective cavity characterization
APPLIED MATERIALS INC0 citations52
US8915389B2Dec 23, 2014
Electron beam welding of large vacuum chamber body having a high emissivity coating
APPLIED MATERIALS INC0 citations52
US12449327B2Oct 21, 2025
Method and apparatus for lamp housing crack detection
APPLIED MATERIALS INC0 citations51
US10763141B2Sep 1, 2020
Non-contact temperature calibration tool for a substrate support and method of using the same
APPLIED MATERIALS INC0 citations33