Inventor
COLLINS RICHARD O
US19 patents
⚠️ This page may combine multiple inventors who share the name “COLLINS RICHARD O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
16 patentsUSD716240SOct 28, 2014
Lower chamber liner
APPLIED MATERIALS INC16 citations84
USD711331SAug 19, 2014
Upper chamber liner
APPLIED MATERIALS INC15 citations84
US11784076B2Oct 10, 2023
Substrate transfer mechanism to reduce back-side substrate contact
APPLIED MATERIALS INC2 citations72
US11424149B2Aug 23, 2022
Substrate transfer mechanism to reduce back-side substrate contact
APPLIED MATERIALS INC1 citations72
US10755955B2Aug 25, 2020
Substrate transfer mechanism to reduce back-side substrate contact
APPLIED MATERIALS INC4 citations72
US10269614B2Apr 23, 2019
Susceptor design to reduce edge thermal peak
APPLIED MATERIALS INC3 citations72
US11171023B2Nov 9, 2021
Diode laser for wafer heating for EPI processes
APPLIED MATERIALS INC4 citations71
US12371776B2Jul 29, 2025
Overlap susceptor and preheat ring
APPLIED MATERIALS INC0 citations61
US11781212B2Oct 10, 2023
Overlap susceptor and preheat ring
APPLIED MATERIALS INC0 citations61
US10837121B2Nov 17, 2020
Susceptor support
APPLIED MATERIALS INC0 citations52
US12188148B2Jan 7, 2025
Multi-layer EPI chamber body
APPLIED MATERIALS INC0 citations51
US12037701B2Jul 16, 2024
Multi-thermal CVD chambers with shared gas delivery and exhaust system
APPLIED MATERIALS INC0 citations50
US12519005B2Jan 6, 2026
Thickness uniformity improvement kit for thermally sensitive epitaxial processing
APPLIED MATERIALS INC0 citations49
US12324061B2Jun 3, 2025
Epitaxial deposition chamber
APPLIED MATERIALS INC0 citations49
US12334318B2Jun 17, 2025
Plasma preclean system for cluster tool
APPLIED MATERIALS INC0 citations42
US9613835B2Apr 4, 2017
Heating lamp assembly
APPLIED MATERIALS INC0 citations40