Inventor · disambiguated record
Si Yi Li
Also filed as: LI SI · LI SI YI · LI SI-YI YI
7 granted patents·2 pending applications·99 citations·filing 2001–2024
85Inventor score
Top patents by PatentIndex Score
9 records- 0189US6670278B2Method of plasma etching of silicon carbideLAM RES CORP·Filed 2001·Granted Dec 30, 2003·54 cites·22 claims
- 0278US10658174B2Atomic layer deposition and etch for reducing roughnessLAM RES CORP·Filed 2017·Granted May 19, 2020·3 cites·12 claims
- 0372US7166535B2Plasma etching of silicon carbideLAM RES CORP·Filed 2003·Granted Jan 23, 2007·11 cites·26 claims
- 0471US6875699B1Method for patterning multilevel interconnectsLAM RES CORP·Filed 2002·Granted Apr 5, 2005·15 cites·13 claims
- 0570US6919278B2Method for etching silicon carbideLAM RES CORP·Filed 2002·Granted Jul 19, 2005·10 cites·19 claims
- 0660US11170997B2Atomic layer deposition and etch for reducing roughnessLAM RES CORP·Filed 2020·Granted Nov 9, 2021·0 cites·14 claims
- 0758US2025208517A1Acidic spin-on carbon (soc) layer for euv lithographyBREWER SCIENCE INC·Filed 2024·Application pending·0 cites
- 0856US7311852B2Method of plasma etching low-k dielectric materialsLAM RES CORP·Filed 2001·Granted Dec 25, 2007·6 cites·23 claims
- 0936US2002177321A1Plasma etching of silicon carbideFiled 2001·Application pending·0 cites
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