Inventor
ABURATANI YUKINORI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “ABURATANI YUKINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
9 patentsUS10453720B1Oct 22, 2019
Method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP3 citations72
USD1112114SFeb 10, 2026
Thermal processing chamber for a semiconductor
KOKUSAI ELECTRIC CORP0 citations62
US12131902B2Oct 29, 2024
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations62
US11891697B2Feb 6, 2024
Substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations62
US11521848B2Dec 6, 2022
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations62
US11289350B2Mar 29, 2022
Method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP1 citations61
US12451375B2Oct 21, 2025
Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate support
KOKUSAI ELECTRIC CORP0 citations59
US12581902B2Mar 17, 2026
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations52
US11424146B2Aug 23, 2022
Substrate processing apparatus and temperature measurement unit
KOKUSAI ELECTRIC CORP0 citations50
ABURATANI YUKINORI
5 patentsUS8128333B2Mar 6, 2012
Substrate processing apparatus and manufacturing method for semiconductor devices
ABURATANI YUKINORI290 citations98
US8814488B2Aug 26, 2014
Substrate processing apparatus and semiconductor device manufacturing method
ABURATANI YUKINORI9 citations83
US8277161B2Oct 2, 2012
Substrate processing apparatus and manufacturing method of a semiconductor device
ABURATANI YUKINORI12 citations82
US8876453B2Nov 4, 2014
Substrate processing apparatus and method of manufacturing semiconductor device
ABURATANI YUKINORI2 citations62
US9082797B2Jul 14, 2015
Substrate processing apparatus and method of manufacturing semiconductor device
ABURATANI YUKINORI0 citations40
HITACHI INT ELECTRIC INC
5 patentsUSD795716SAug 29, 2017
Substrate thermometry unit
HITACHI INT ELECTRIC INC10 citations84
US7700054B2Apr 20, 2010
Substrate processing apparatus having gas side flow via gas inlet
HITACHI INT ELECTRIC INC5 citations62
USD795715SAug 29, 2017
Substrate thermometry unit
HITACHI INT ELECTRIC INC1 citations52
US10014171B2Jul 3, 2018
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations41
US10403478B2Sep 3, 2019
Plasma processing apparatus and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations40
KOKUSAI ELECTRIC CO LTD
4 patentsUS5788447AAug 4, 1998
Substrate processing apparatus
KOKUSAI ELECTRIC CO LTD246 citations97
US6066210AMay 23, 2000
Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section
KOKUSAI ELECTRIC CO LTD93 citations96
US6143083ANov 7, 2000
Substrate transferring mechanism
KOKUSAI ELECTRIC CO LTD81 citations95
US6190104B1Feb 20, 2001
Treatment object conveyor apparatus, semiconductor manufacturing apparatus, and treatment object treatment method
KOKUSAI ELECTRIC CO LTD28 citations92