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Semiconductor manufacturing equipment

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Assignee: SHIMADA MASAKAZUPriority: Jun 1, 2010Filed: Nov 29, 2010Granted: Jan 10, 2012
Est. expiryJun 1, 2030(~3.9 yrs left)· nominal 20-yr term from priority
Inventors:Masakazu ShimadaTakashi NogamiSatoshi AizawaSeiyo NakashimaTomoyuki YamadaShinobu SugiuraYukinori AburataniMitsuhiro Nagata
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Claims

Claims

exact text as granted — not AI-modified
We claim the ornamental design for a semiconductor manufacturing equipment, as shown and described.

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