Inventor · disambiguated record
Sunil Shanker
Also filed as: SHANKER SUNIL
51 granted patents·5 pending applications·4,260 citations·filing 2005–2015
99Inventor score
Top patents by PatentIndex Score
56 records- 0199US8440259B2Vapor based combinatorial processingCHIANG TONY P·Filed 2008·Granted May 14, 2013·539 cites·19 claims
- 0299US7915139B1CVD flowable gap fillNOVELLUS SYSTEMS INC·Filed 2009·Granted Mar 29, 2011·807 cites·25 claims
- 0399US7888233B1Flowable film dielectric gap fill processNOVELLUS SYSTEMS INC·Filed 2009·Granted Feb 15, 2011·572 cites·30 claims
- 0499US7582555B1CVD flowable gap fillNOVELLUS SYSTEMS INC·Filed 2005·Granted Sep 1, 2009·605 cites·20 claims
- 0599US7524735B1Flowable film dielectric gap fill processNOVELLUS SYSTEMS INC·Filed 2006·Granted Apr 28, 2009·166 cites·19 claims
- 0699US7514375B1Pulsed bias having high pulse frequency for filling gaps with dielectric materialNOVELLUS SYSTEMS INC·Filed 2006·Granted Apr 7, 2009·559 cites·27 claims
- 0798US8809161B2Flowable film dielectric gap fill processNOVELLUS SYSTEMS INC·Filed 2013·Granted Aug 19, 2014·21 cites·27 claims
- 0897US8143092B2Methods for forming resistive switching memory elements by heating deposited layersKUMAR PRAGATI·Filed 2009·Granted Mar 27, 2012·92 cites·13 claims
- 0996US8334015B2Vapor based combinatorial processingCHIANG TONY P·Filed 2008·Granted Dec 18, 2012·22 cites·9 claims
- 1096US8153535B1Combinatorial plasma enhanced deposition techniquesSHANKER SUNIL·Filed 2011·Granted Apr 10, 2012·8 cites·8 claims
- 1196US8129288B2Combinatorial plasma enhanced deposition techniquesSHANKER SUNIL·Filed 2009·Granted Mar 6, 2012·17 cites·29 claims
- 1296US7951683B1In-situ process layer using silicon-rich-oxide for etch selectivity in high AR gapfillNOVELLUS SYSTEMS INC·Filed 2007·Granted May 31, 2011·46 cites·23 claims
- 1395US8580697B1CVD flowable gap fillLANG CHI-I·Filed 2011·Granted Nov 12, 2013·44 cites·19 claims
- 1495US8481403B1Flowable film dielectric gap fill processGAURI VISHAL·Filed 2011·Granted Jul 9, 2013·30 cites·25 claims
- 1595US8409354B2Vapor based combinatorial processingCHIANG TONY P·Filed 2011·Granted Apr 2, 2013·14 cites·13 claims
- 1695US8318572B1Inexpensive electrode materials to facilitate rutile phase titanium oxideSHANKER SUNIL·Filed 2010·Granted Nov 27, 2012·18 cites·26 claims
- 1795US8294219B2Nonvolatile memory element including resistive switching metal oxide layersMALHOTRA SANDRA G·Filed 2008·Granted Oct 23, 2012·39 cites·15 claims
- 1895US8148273B1Combinatorial plasma enhanced deposition techniquesSHANKER SUNIL·Filed 2011·Granted Apr 3, 2012·6 cites·9 claims
- 1995US7211525B1Hydrogen treatment enhanced gap fillNOVELLUS SYSTEMS INC·Filed 2005·Granted May 1, 2007·540 cites·21 claims
- 2094US8821987B2Combinatorial processing using a remote plasma sourceINTERMOLECULAR INC·Filed 2012·Granted Sep 2, 2014·8 cites·9 claims
- 2194US8318611B2Combinatorial plasma enhanced deposition techniquesSHANKER SUNIL·Filed 2011·Granted Nov 27, 2012·5 cites·8 claims
- 2293US8389419B2Combinatorial plasma enhanced deposition techniquesSHANKER SUNIL·Filed 2011·Granted Mar 5, 2013·4 cites·20 claims
- 2393US8372758B2Combinatorial plasma enhanced deposition techniquesINTERMOLECULAR INC·Filed 2011·Granted Feb 12, 2013·4 cites·8 claims
- 2493US7727906B1H2-based plasma treatment to eliminate within-batch and batch-to-batch etch driftNOVELLUS SYSTEMS INC·Filed 2006·Granted Jun 1, 2010·23 cites·15 claims
- 2589US8278735B2Yttrium and titanium high-k dielectric filmsHASHIM IMRAN·Filed 2010·Granted Oct 2, 2012·10 cites·22 claims
- 2689US7927947B2Methods for depositing high-K dielectricsINTERMOLECULAR INC·Filed 2009·Granted Apr 19, 2011·10 cites·20 claims
- 2788US8354702B1Inexpensive electrode materials to facilitate rutile phase titanium oxideELPIDA MEMORY INC·Filed 2010·Granted Jan 15, 2013·10 cites·20 claims
- 2885US8980765B2Combinatorial plasma enhanced deposition techniquesINTERMOLECULAR INC·Filed 2012·Granted Mar 17, 2015·1 cites·20 claims
- 2983US9245744B2Combinatorial plasma enhanced deposition and etch techniquesINTERMOLECULAR INC·Filed 2014·Granted Jan 26, 2016·4 cites·20 claims
- 3083US8737036B2Titanium based high-K dielectric filmsINTERMOLECULAR INC·Filed 2012·Granted May 27, 2014·4 cites·16 claims
- 3183US8726838B2Combinatorial plasma enhanced deposition and etch techniquesSHANKER SUNIL·Filed 2010·Granted May 20, 2014·5 cites·15 claims
- 3283US7968452B2Titanium-based high-K dielectric filmsINTERMOLECULAR INC·Filed 2009·Granted Jun 28, 2011·6 cites·20 claims
- 3379US8318573B2Nonvolatile memory elementsMALHOTRA SANDRA G·Filed 2011·Granted Nov 27, 2012·3 cites·16 claims
- 3477US8877550B2Methods for forming resistive switching memory elements by heating deposited layersKUMAR PRAGATI·Filed 2012·Granted Nov 4, 2014·2 cites·10 claims
- 3577US8828821B2Fabrication of semiconductor stacks with ruthenium-based materialsCHEN HANHONG·Filed 2009·Granted Sep 9, 2014·5 cites·14 claims
- 3676US8202808B2Methods of forming strontium titanate filmsMATZ LAURA M·Filed 2010·Granted Jun 19, 2012·3 cites·13 claims
- 3775US8901708B2Yttrium and titanium high-k dielectric filmsINTERMOLECULAR INC·Filed 2012·Granted Dec 2, 2014·2 cites·13 claims
- 3875US8541828B2Methods for depositing high-K dielectricsINTERMOLECULAR INC·Filed 2012·Granted Sep 24, 2013·2 cites·18 claims
- 3973US8551851B2Titanium-based high-K dielectric filmsCHEN HANHONG·Filed 2011·Granted Oct 8, 2013·2 cites·3 claims
- 4072US9029232B2Nonvolatile memory elementsINTERMOLECULAR INC·Filed 2014·Granted May 12, 2015·1 cites·20 claims
- 4168US2009061646A1Vapor based combinatorial processingCHIANG TONY P·Filed 2008·Application pending·0 cites
- 4267US2015144061A1Combinatorial Plasma Enhanced Deposition TechniquesINTERMOLECULAR INC·Filed 2015·Application pending·0 cites
- 4364US9082782B2Inexpensive electrode materials to facilitate rutile phase titanium oxideINTERMOLECULAR INC·Filed 2012·Granted Jul 14, 2015·1 cites·16 claims
- 4462US8765567B2Nonvolatile memory elementsINTERMOLECULAR INC·Filed 2013·Granted Jul 1, 2014·0 cites·20 claims
- 4560US8592282B2Nonvolatile memory elementsINTERMOLECULAR INC·Filed 2012·Granted Nov 26, 2013·0 cites·19 claims
- 4659US9397292B2Methods for forming resistive switching memory elements by heating deposited layersINTERMOLECULAR INC·Filed 2014·Granted Jul 19, 2016·0 cites·19 claims
- 4757US8900422B2Yttrium and titanium high-K dielectric filmHASHIM IMRAN·Filed 2009·Granted Dec 2, 2014·0 cites·29 claims
- 4856US8900418B2Yttrium and titanium high-k dielectric filmsINTERMOLECULAR INC·Filed 2012·Granted Dec 2, 2014·0 cites·15 claims
- 4955US2014273309A1Controlling Radical Lifetimes in a Remote Plasma ChamberINTERMOLECULAR INC·Filed 2013·Application pending·0 cites
- 5054US8821795B2Combinatorial screening method and apparatusHASHIM IMRAN·Filed 2009·Granted Sep 2, 2014·0 cites·14 claims
Showing the top 50 of 56 patent records by PatentIndex Score.
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