Inventor
GURARY ALEXANDER I
US42 patents
⚠️ This page may combine multiple inventors who share the name “GURARY ALEXANDER I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
17 patentsUSD819580SJun 5, 2018
Self-centering wafer carrier for chemical vapor deposition
VEECO INSTR INC445 citations98
USD810705SFeb 20, 2018
Self-centering wafer carrier for chemical vapor deposition
VEECO INSTR INC499 citations98
US10134617B2Nov 20, 2018
Wafer carrier having thermal cover for chemical vapor deposition systems
VEECO INSTR INC369 citations96
US8021487B2Sep 20, 2011
Wafer carrier with hub
VEECO INSTR INC33 citations92
US9273413B2Mar 1, 2016
Wafer carrier with temperature distribution control
VEECO INSTR INC7 citations84
US9677944B2Jun 13, 2017
Temperature control for GaN based materials
VEECO INSTR INC6 citations83
US7452125B2Nov 18, 2008
Calibration wafer and method of calibrating in situ temperatures
VEECO INSTR INC15 citations83
USD748591SFeb 2, 2016
Keyed spindle
VEECO INSTR INC3 citations73
US10438795B2Oct 8, 2019
Self-centering wafer carrier system for chemical vapor deposition
VEECO INSTR INC4 citations72
US9388493B2Jul 12, 2016
Self-cleaning shutter for CVD reactor
VEECO INSTR INC6 citations72
USD744967SDec 8, 2015
Spindle key
VEECO INSTR INC1 citations62
US9200965B2Dec 1, 2015
Temperature control for GaN based materials
VEECO INSTR INC2 citations62
US9053935B2Jun 9, 2015
Chemical vapor deposition with elevated temperature gas injection
VEECO INSTR INC1 citations62
US10002805B2Jun 19, 2018
Processing methods and apparatus with temperature distribution control
VEECO INSTR INC0 citations52
US9982362B2May 29, 2018
Density-matching alkyl push flow for vertical flow rotating disk reactors
VEECO INSTR INC0 citations52
US12104242B2Oct 1, 2024
Deposition system with integrated carrier cleaning modules
VEECO INSTR INC0 citations51
US10718052B2Jul 21, 2020
Rotating disk reactor with ferrofluid seal for chemical vapor deposition
VEECO INSTR INC0 citations34
KRISHNAN SANDEEP
7 patentsUSD687791SAug 13, 2013
Multi-keyed wafer carrier
KRISHNAN SANDEEP28 citations92
USD687790SAug 13, 2013
Keyed wafer carrier
KRISHNAN SANDEEP26 citations92
USD726133SApr 7, 2015
Keyed spindle
KRISHNAN SANDEEP4 citations72
USD711332SAug 19, 2014
Multi-keyed spindle
KRISHNAN SANDEEP4 citations72
USD712852SSep 9, 2014
Spindle key
KRISHNAN SANDEEP3 citations62
US9816184B2Nov 14, 2017
Keyed wafer carrier
KRISHNAN SANDEEP0 citations41
US10316412B2Jun 11, 2019
Wafter carrier for chemical vapor deposition systems
KRISHNAN SANDEEP0 citations36
EMCORE CORP
6 patentsUS6001183ADec 14, 1999
Wafer carriers for epitaxial growth processes
EMCORE CORP550 citations98
US5759281AJun 2, 1998
CVD reactor for uniform heating with radiant heating filaments
EMCORE CORP413 citations98
US5835677ANov 10, 1998
Liquid vaporizer system and method
EMCORE CORP185 citations96
US6197121B1Mar 6, 2001
Chemical vapor deposition apparatus
EMCORE CORP99 citations94
US5840124ANov 24, 1998
Wafer carrier with flexible wafer flat holder
EMCORE CORP45 citations91
US6368404B1Apr 9, 2002
Induction heated chemical vapor deposition reactor
EMCORE CORP25 citations86
GURARY ALEXANDER I
6 patentsUSD695241SDec 10, 2013
Wafer carrier having pockets
GURARY ALEXANDER I24 citations92
USD695242SDec 10, 2013
Wafer carrier having pockets
GURARY ALEXANDER I20 citations92
USD690671SOct 1, 2013
Wafer carrier having pockets
GURARY ALEXANDER I29 citations92
USD686175SJul 16, 2013
Wafer carrier having pockets
GURARY ALEXANDER I30 citations92
US8888360B2Nov 18, 2014
Methods and systems for in-situ pyrometer calibration
GURARY ALEXANDER I13 citations84
US8562746B2Oct 22, 2013
Sectional wafer carrier
GURARY ALEXANDER I18 citations80