Inventor
NAGAKUBO KEIICHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “NAGAKUBO KEIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUSD559994SJan 15, 2008
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TOKYO ELECTRON LTD529 citations98
USD559993SJan 15, 2008
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TOKYO ELECTRON LTD499 citations98
USD560284SJan 22, 2008
Cover ring
TOKYO ELECTRON LTD25 citations92
US9818583B2Nov 14, 2017
Electrode plate for plasma etching and plasma etching apparatus
TOKYO ELECTRON LTD2 citations73
US10569310B2Feb 25, 2020
Method for cleaning substrate transfer mechanism and substrate processing system
TOKYO ELECTRON LTD2 citations72
US11148179B2Oct 19, 2021
Method for cleaning substrate transfer mechanism and substrate processing system
TOKYO ELECTRON LTD1 citations62
US10720356B2Jul 21, 2020
Substrate processing apparatus and method of transferring substrate
TOKYO ELECTRON LTD1 citations62
US8715782B2May 6, 2014
Surface processing method
TOKYO ELECTRON LTD0 citations52